Fabrication and electrical characterization of three-dimensional graphitic microchannels in single crystal diamond

New Journal of Physics

Volumn 14, Issue , 2012, Pages

  Picollo, F ^a,b   Gatto Monticone, D ^a,b   Olivero, P ^a,b,e   Fairchild, B A ^c   Rubanov, S ^d   Prawer, S ^c   Vittone, E ^a,b,e  

^a UNIVERSITY OF TURIN   (Italy)

^b SEZIONE DI TORINO   (Italy)

^c UNIVERSITY OF MELBOURNE   (Australia)

^d UNIVERSITY OF MELBOURNE   (Australia)

^e NONE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BURIED CHANNELS; CRITICAL DAMAGE; CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; DIAMOND BASED DEVICES; DIRECT WRITING; ELECTRICAL CHARACTERIZATION; END-OF-RANGE; GRAPHITIC PHASE; HELIUM ION; HIGH ENERGY; HIGH-TEMPERATURE ANNEALING; INSULATING MATRIX; ION FLUENCES; ION MICROBEAMS; ROOM TEMPERATURE; SAMPLE SURFACE; SIGNIFICANT IMPACTS; SINGLE CRYSTAL DIAMOND; SPATIAL ACCURACY; SPATIAL DIRECTION; SPECIFIC LOCATION; STRUCTURAL DAMAGES; THERMAL PROCESS; THERMAL-ANNEALING; VARIABLE TEMPERATURE;

ANNEALING; BIOSENSORS; IONIZING RADIATION; MICROCHANNELS; THREE DIMENSIONAL; TRANSMISSION ELECTRON MICROSCOPY;

DIAMONDS;

EID: 84862112318     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/14/5/053011     Document Type: Article

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