Developments in synthesis, characterization, and application of large, high-quality CVD single crystal diamond

Journal of Superhard Materials

Volumn 35, Issue 4, 2013, Pages 195-213

  Liang, Q ^a   Meng, Y F ^a   Yan, C S ^a   Krasnicki, S ^a   Lai, J ^a   Hemawan, K ^a   Shu, H ^a   Popov, D ^b   Yu, T ^a   Yang, W ^b   Mao, H K ^a   Hemley, R J ^a  

^a GEOPHYSICAL LABORATORY   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

absorption; annealing; cathodoluminescence; chemical vapor deposition (CVD); deposition; hardness; high pressure; infrared spectroscopy; microwave; photoluminescence; plasma; single crystal diamond; toughness; X ray diffraction; X ray spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITIONS (CVD); EXTREME CONDITIONS; HIGH PRESSURE; HIGH QUALITY SINGLE CRYSTALS; MATERIALS RESEARCH; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITIONS; SINGLE CRYSTAL CVD DIAMOND; SINGLE CRYSTAL DIAMOND;

ABSORPTION; ANNEALING; CATHODOLUMINESCENCE; CHEMICAL VAPOR DEPOSITION; DEPOSITION; HARDNESS; INFRARED SPECTROSCOPY; MECHANICAL PROPERTIES; MICROWAVES; PHOTOLUMINESCENCE; PLASMAS; SINGLE CRYSTALS; TOUGHNESS; VAPORS; X RAY DIFFRACTION; X RAY SPECTROSCOPY;

SYNTHETIC DIAMONDS;

EID: 84883404981     PISSN: 10634576     EISSN: 19349408     Source Type: Journal    
DOI: 10.3103/S1063457613040011     Document Type: Article

References (78)

1. Hall, H.T., The Synthesis of Diamond, J. Chem. Educ., 1961, vol. 38(10), pp. 484-488.
2. Eversole, W.G., U.S. Patent 3030188, 1961.
3. Jayaraman, A., Diamond Anvil Cell and High Pressure Physical Investigations, Rev. Modern Phys., 1983, vol. 55, pp. 65-108.
4. Hemley, R.J., Percy W. Bridgman's Second Century, High Press. Res., 2010, vol. 30, no. 4, 581-619.
5. Yan, C.S., Vohra, Y.K., Mao, H.K., and Hemley R.J., Very High Growth Rate Chemical Vapor Deposition of Single Crystal Diamond, Proc. Nat. Acad. Sci., 2002, vol. 99, no. 20, pp. 12523-12525.
6. Ho, S.S., Yan, C.S., Liu, Z., Mao, H.K., and Hemley, R.J., Prospects for Large Single Crystal CVD Diamonds, Indust. Diamond Rev., 2006, vol. 66, no. 10, pp. 28-32.
7. Liang, Q., Chin, C.Y., Lai, J., Yan, C.S., Meng, Y.F., Mao, H.K., and Hemley, R.J., Enhanced Growth of High Quality Single Crystal Diamond by MPCVD at High Gas Pressures, Appl. Phys. Lett., 2009, vol. 94, art. 024103.
8. Chifre, J., Lopez, F., Morenza, J.L., and Esteve, J., Analysis of Contamination in Diamond Films by Secondary Ion Mass Spectroscopy, Diamond Relat. Mater., 1992, vol. 1, pp. 500-503.
9. Gheeraert, E., Deneuville, A., Brunel, M., and Oberlin, J. C. Tungsten Incorporation in Diamond Thin Films Prepared by the Hot-Filament Technique, ibid., vol. 4,issue 5-6, pp. 504-507.
10. Ohtake, N. and Yoshikawa, M., Diamond Film Preparation by Arc Discharge Plasma Jet Chemical Vapor Deposition in the Methane Atmosphere, J. Electrochem. Soc., 1990, vol. 137, no. 2, pp. 717-722.
11. Ohtake, N., Kuriyama, Ya, Yoshikawa, M., Obana, H., Kito, M., and Saito, H., Development of an Arc-Discharge Plasma Apparatus for the High-Rate Synthesis of Diamond, Int. J. Japan Soc. Prec. Eng., 1991, vol. 25, no. 1, pp. 5-10.
12. Characterization of Plasma Process, Bachmann, P.K. and Lydtin, H., Eds., in Materials Research Society Symposium Proceedings, Warrendale: Materials Research Society, 1990.
13. Field, J. The Properties of Natural and Synthetic Diamond, London: Academic, 1992.
14. Sussmann, R.S., Dialm, a New Diamond Material for Optics and Electronics, Indust. Diamond Rev., 1993, vol. 53, pp. 63-71.
15. Cao, G.Z., Schermer, J.J., van Enckevort, W.J.P., et al., Growth of {100} Textured Diamond Films by the Addition of Nitrogen, J. Appl. Phys., 1996, vol. 79, pp. 1357-1364.
16. Jiang, X. and Jia, C.L., The Coalescence of [001] Diamond Grains Heteroepitaxially Grown on (001) Silicon, Appl. Phys. Lett., 1996, vol. 69, pp. 3902-3904.
17. Gruen, D.M., Nanocrystalline Diamond Films, Ann. Rev. Mater. Sci., 1999, vol. 29, pp. 211-259.
18. Spitsyn, B., Bouilov, L.L, and Deryagin, B.V., Vapor Growth of Diamond on Diamond and Other Surfaces, J. Cryst. Growth, 1981, vol. 52, pp. 219-226.
19. Kamo, M., Sato, Y., Matsumoto, S., and Setaka, N., Diamond Synthesis from Gas Phase in Microwave Plasma, ibid., 1983, vol. 62, pp. 642-644.
20. Afzal, A., Rego, C.A., Ahmed, W., and Cherry, R.I., HFCVD Diamond Grown with Added Nitrogen: Film Characterization and Gas-Phase Composition Studies, Diamond Relat. Mater., 1998, vol. 7, pp. 1033-1038.
21. Handbook of Industrial Diamonds and Diamond Films, Prelas, M.A., Popovichi, G., and Bigelow, L.K., Eds., New York: Marcel Dekker, 1998.
22. Yan, C.S., Multiple Twinning and Nitrogen Defect Center in Chemical Vapor Deposited Homoepitaxial Diamond, Ph.D. Dissertation, Birmingham: University of Alabama, 1999.
23. Yan, C.S. and Vohra, Y.K., Multiple Twinning and Nitrogen Defect Center in Chemical Vapor Deposition Deposited Homoepitaxial Diamond, Diamond Relat. Mater., 1999, vol. 8, pp. 2022-2031.
24. Tamor, M. and Everson, M.P., On the Role of Penetration Twins in the Morphological Development of Vapor-Grown Diamond Films, J. Mater. Res., 1994, vol. 9, pp. 1839-1847.
25. Wild, C., Kohl, R., Herres, N., Müller-Sebert, W., and Koidl, P., Oriented CVD Diamond Films: Twin Formation, Structure and Morphology, Diamond Relat. Mater., 1994, vol. 3, pp. 373-381.
26. Hemawan, K.W., Yan, C.S., Liang, Q., Lai, J., Meng, Y.F., Krasnicki, S., Mao, H.K., and Hemley, R.J. Hot Spot Formation in Microwave Plasma CVD Diamond Synthesis, IEEE Trans. Plasma Sci., 2011, vol. 39, pp. 2790-2791.
27. Meng, Y.F., Yan, C.S., Mao H. K., and Hemley, R.J., Enhanced Optical Properties of Chemical Vapor Deposited Single Crystal Diamond by Low-Pressure High-Temperature Annealing, Proc. Nat. Acad. Sci., 2008, vol. 105, pp. 17620-17625.
28. Liou, Y., Inspektor, A., Weimer, R., Knight, D., and Messier, R., The Effect of Oxygen in Diamond Deposition by Microwave Plasma Enhanced Chemical Vapour Deposition, J. Mater. Res., 1990, vol. 5, no. 11, pp. 2305-2312.
29. Fuchs, F., Wild, C., Schwarz, K., Muller-Sebert, W., and Koidl, P., Hydrogen-Induced Vibrational and Electronic Transitions in Chemical Vapor Deposited Diamond, Identified by Isotopic Substitution, Appl. Phys. Lett., 1995, vol. 66, pp. 177-179.
30. Tallaire, A., Achard, J., Silva, F., Sussmann, R.S., Gicquel, A., and Rzepka, E., Oxygen Plasma Pre-Treatments for High Quality Homoepitaxial CVD Diamond Deposition, Phys. Stat. Sol. A, 2004, vol. 241, no. 10, pp. 2419-2424.
31. Martineau P.M., Lawson S.C., Lawson A.J., Quinn S.J., Evans J.F., and Crowder M.J., Identification of Synthetic Diamond Grown Using Chemical Vapor Deposition (CVD), Gems Gemol., 2004, vol. 40, pp. 2-25.
32. Smith, C.P., Bosshart G., Ponahlo J. et al., GE POL Diamonds: Before and After, ibid., 2000, vol. 36, pp. 192-215.
33. Weerdt, F.D. and Van Royen, J., Investigation of Seven Diamonds HPHT Treated by NovaDiamond, J. Gemm., 2000, vol. 7, pp. 201-208.
34. Shiryaev, A.A., Hutchison, M.T., Dembo, K.A., Dembo, A.T., Iakoubovskii, K., Klyuev, Yu.A., and Naletov A.M., High Temperature-High Pressure Annealing of Diamond Small Angle X-Ray Scattering and Optical Study, Physica B, 2001, vols.308-310, pp. 598-603.
35. Collins, A.T., Connor, A., Ly, C.-H., Shareef, A., and Spear, P.M., High-Temperature Annealing of Optical Centers in Type I Diamond, J. Appl. Phys., 2005, vol. 97, no. 8, art. 083517.
36. Weerdt, F.D. and Collins, A.T., HPHT Annealing of Natural Diamond, New Diamond and Frontier Carbon Technolo-gy, 2007, vol. 17, no. 2, pp. 91-103.
37. Charles, S.J., Butler, J.E., Feygelson, B.N., Newton, M.E., Carroll, D.L., Steeds, J.W., Darwish, H., Yan, C.-S., Mao, H.K., and Hemley, R.J., Characterization of Nitrogen-Doped Chemical Vapor Deposited Single Crystal Diamond before and after High Pressure, High Temperature Annealing, Phys. Stat. Sol., 2004, vol. 242, pp. 2473-2485.
38. Woods, G.S. and Collins, A.T., Infrared Absorption Spectra of Hydrogen Complexes in Type I Diamonds, J. Phys. Chem. Solids, 1983, vol. 44, pp. 471-475.
39. Glover, C., Newton, M.E., Martineau, P., Twitchen, D.J., and Baker, J.M, Hydrogen Incorporation in Diamond: The Nitrogen-Vacancy-Hydrogen Complex, Phys. Rev. Lett., 2003, vol. 90, art. 185507.
40. Novikov, N.V., Sirota, Yu.V., Mal'nev, V.I., and Petrusha, I.A., Mechanical Properties of Diamond and Cubic BN at Different Temperatures and Deformation Rates, Diamond Relat. Mater., 1993, vol. 2, pp. 1253-1256.
41. Drory, M.D., Dauskardt, R.H., Kant, A., and Ritchie, R.O., Fracture of Synthetic Diamond, J. Appl. Phys., 1995, vol.78, pp. 3083-3088.
42. Novikov, N.V. and Dub, S.N., Hardness and Fracture Toughness of CVD Diamond Film, Diamond Relat. Mater., 1996, vol. 5, pp. 1026-1030.
43. Yan, C.S., Mao, H.K., Li, W., Qian, J., Zhao, Y., and Hemley, R.J., Ultrahard Single Crystal Diamond from Chemical Vapor Deposition, Phys. Stat.Sol.(a), 2004, vol. 201, pp. 25-27.
44. Liang, Q., Yan, C.S., Meng, Y., Lai, J., Krasnicki, S., Mao, H.K., and Hemley, R.J., Recent Advances in High-Growth Rate Single-Crystal CVD Diamond, Diamond Relat. Mater., 2009, vol. 18, pp. 698-703.
45. Liang, Q., Yan C.S., Meng, Y., Lai, J., Krasnicki, S., Mao, H.K., and Hemley R.J., Enhancing the Mechanical Properties of CVD Single Crystal Diamond, J. Phys. Condens. Matt., 2009, vol. 21, art. 364215.
46. Novikov, N.V., Dub, S.N, and Mal'nev, V.I., High-Temperature Fracture Toughness of Monocrystalline Diamonds, J. Hard. Mater., 1993, vol. 4, pp. 19-27.
47. Patridge, G.P., May, P.W., Rega, C.A., and Ashfald, M.N.R., Potential for Diamond Fibres and Diamond Fibre Composites, Mat. Sci. Tech., 1994, vol. 10, pp. 505-512.
48. Locher, R., Wild, C., Herres, N., Behr, D., and Koidl, P., Nitrogen Stabilized 〈100⌠Texture in Chemical Vapor Deposited Diamond Films, Appl. Phys. Lett., 1994, vol. 65, pp. 34-36.
49. Burns, R.C., Cvetkovic, V., Dodge, C.N., Evans, D.J.F., Rooney, M.-L.T., Spear, P.M., and Welbourn, C.M., Growth-Sector Dependence of Optical Features in Large Synthetic Diamonds, J. Cryst. Growth, 1990, vol. 104, pp. 257-279.
50. Ramamurti, R., Becker, M., Schuelke, T., Grotjohn, T., Reinhard, D., Swain G., and Asmussen, J., Boron-Doped Diamond Deposited by Microwave Plasma-Assisted CVD at Low and High Pressures, Diamond Relat. Mater., 2008, vol. 17, pp. 481-485.
51. Tsuno, T., Tomikawa, T., Shikata, S., Imai, T., and Fujimori, N., Diamond (001) Single-Domain 2×1 Surface Grown By Chemical Vapor Deposition, Appl. Phys. Lett., 1994, vol. 64, pp. 572-574.
52. Anderson, G.C., Prawer, S., Johnston, P., and McCulloch, D., The Effect of Carbon and Nitrogen Implantation on the Abrasion Resistance of Type IIa (110) Diamond, Nucl. Instrum. Meth. Phys Res. B, 1993, vols. 80-81, pp. 1451-1455.
53. Meng, Y. and Anthony, T.R., U.S. Patent 6322891, 2001.
54. Anthony, T.R., Stresses Generated by Impurities in Diamond, Diamond Relat. Mater., 1995, vol. 4, pp. 1346-1352.
55. Larson, B.C., Yang, W., Ice, G.E., Budai, J.D., and Tischler, J.Z., Three-Dimensional X-Ray Structural Microscopy with Submicrometer Resolution, Nature, 2002, vol. 415, no. 6874, pp. 887-890.
56. Weir, C.E., Lippincott, E.R., Van Valkenburg, A., and Bunting, E.N., Infrared Studies in the 1-Micron to 15-Micron Region to 30,000 Atmospheres, J. Res. Nat. Bur. Stand. Sec. A: Phys. Chem., 1959, vol. 63.
57. Hemley, R.J. and Ashfold, M.N., The Revealing Role of Pressure in the Condensed Matter Sciences, Phys. Today, 1998, vol. 51, pp. 26-32.
58. Hemley, R.J., A Pressing Matter, Phys. World, 2006, vol. 19, pp. 26-30.
59. Goncharov, A.F., Hemley, R.J., Mao, H.K., and Shu, J., New High-Pressure Excitations in Parahydrogen, Phys. Rev. Lett., 1998, vol. 80, pp. 101-104.
60. Merkel, S., Hemley, R.J., and Mao, H.K, Finite Element Modeling of Diamond Deformation at Multimegabar Pressures, Appl. Phys. Lett., 1999, vol. 74, no.5, pp. 656-658.
61. Takano, K.J. and Wakatsuki, M., An Optical High-Pressure-Cell with Spherical Sapphire Anvils, Rev. of Sci. Instruments, 1991, vol. 62, pp. 1576-1580.
62. Xu, J., Mao, H., Hemley, R.J., and Hines E., Large Volume High-Pressure Cell with Supported Moissanite Anvils, ibid., 2004, vol. 75, pp. 1034-1038.
63. Mao, H.K. and Hemley, R.J., Ultrahigh-Pressure Transitions in Solid Hydrogen, Rev. Modern Phys., 1994, vol. 66, pp. 671-692.
64. Dewaele, A., Loubeyre, P., Andre, R., and Hartwig, J., An X-ray Topographic Study of Diamond Anvils: Correlation between Defects and Helium Diffusion, J. Appl. Phys., 2006, vol. 99, art. 104906.
65. Hemley, R.J., Mao, H.-K., Goncharov, A.F., Hanfland, M., and Struzkin, V., Synchrotron Infrared Spectroscopy to 0.15 eV of h-2 and d-2 at Megabar Pressures, Phys. Rev. Lett., 1996, vol. 76, pp. 1667-1670.
66. Hemley, R.J. and Mao, H.K., Progress in Cryocrystals at Megabar Pressures, J. Low Temp. Phys., 2001, vol. 122, pp. 331-344.
67. Gregoryanz, E., Goncharov, A.F., Matsuishi, K., Mao, H.K., and Hemley, R.J., Raman Spectroscopy of Hot Dense Hydrogen, Phys. Rev. Lett., 2003, vol. 90, art. 175701.
68. Mills, R.L., Liebenberg, D.H., Bronson, J.C., and Schmidt, L.C., Procedure for Loading Diamond Cells with High-Pressure Gas, Rev. Sci. Instrum., 1980, vol. 51, pp. 891-895.
69. Eremets, M.I., Megabar High-Pressure Cells for Raman Measurements, J. Raman Spectr., 2003, vol. 34, pp. 515-518.
70. Sun, L., Ruoff, A.L., and Stupian, G., Convenient Optical Pressure Gauge for Multimegabar Pressures Calibrated to 300 GPa, Appl. Phys. Lett., 2005, vol. 86, art. 014103.
71. Zha, C.S., Krasnicki, S., Meng, Y.F., Yan, C.S., Lai, J., Liang, Q., Mao, H.K., Hemley, R.J., Composite Chemical Vapor Deposition Diamond Anvils for High-Pressure/High-Temperature Experiments, High Pressure Research, 2009, vol. 29, no. 3, pp. 317-324.
72. Wang, S., Meng, Y., Ando, N., Tate, M., Krasnicki, S., Yan, C., Liang, Q., Lai, J., Mao, H., Gruner, S.M., and Hemley, R.J., Single-Crystal CVD Diamonds as Small-Angle X-Ray Scattering Windows for High-Pressure Research, J. Appl. Crystallography, 2011, vol. 45, pp. 453-457.
73. Ando, N., Chenevier, P., Novak, M., Tate, M.W., and Gruner, S.M., High Hydrostatic Pressure Small-Angle X-Ray Scattering Cell for Protein Solution Studies Featuring Diamond Windows and Disposable Sample Cells, ibid., 2008, vol. 41, pp. 167-175.
74. Shiryaev, A. A., SANS from Defects in Diamond, ibid., 2007, vol. 40, pp. s116-s120.
75. Shiryaev, A.A. and Boesecke, P., Small-Angle X-ray and Neutron Scattering from Diamond Single Crystals, http://arxiv.org/abs/1110.6270, 2011.
76. Gaukroger, M. P., Martineau, P.M., Crowder, M.J., Friel, I., Williams, S.D., and Twitchen, D.J., X-Ray Topography Studies of Dislocations in Single Crystal CVD Diamond, Diamond Relat. Mater., 2008, vol. 17, pp. 262-269.
77. Popov, D., Personal Communication, 2012.
78. Ando, N., Barstow, B., Baase, W., Fields, A., Brian, A., Matthews, W., and Gruner, S.M., Structural and Thermodynamic Characterization of T4 Lysozyme Mutants and the Contribution of Internal Cavities to Pressure Denaturation, Biochem., 2008, vol. 47, pp. 11097-11109.