Solving the inverse grating problem by white light interference Fourier scatterometry

Light: Science and Applications

Volumn 1, Issue NOVEMBER, 2012, Pages

  Ferreras Paz, Valeriano ^a   Peterhänsel, Sandy ^a   Frenner, Karsten ^a   Osten, Wolfgang ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Fourier scatterometry; Inverse problem; Optical sub lambda metrology; RCWA; White light interference

Indexed keywords

EID: 84879953390     PISSN: None     EISSN: 20477538     Source Type: Journal    
DOI: 10.1038/lsa.2012.36     Document Type: Article

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