Resolution enhancement technologies in optical metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5776, Issue , 2005, Pages 10-21

  Osten, Wolfgang ^a   Kerwien, Norbert ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Resolution enhancement technologies; Resolution limit; Scaled metrology; Spatial resolution

Indexed keywords

AMPLIFICATION; HOLOGRAPHY; LASER APPLICATIONS; OPTICAL RESOLVING POWER; STIMULATED EMISSION; WAVEFRONTS;

RESOLUTION ENHANCEMENT TECHNOLOGIES (RET); RESOLUTION LIMIT; SCALED METROLOGY; SPATIAL RESOLUTION;

OPTICAL VARIABLES MEASUREMENT;

EID: 26444575373     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.611594     Document Type: Conference Paper

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