Optical fourier transform scatterometry for LER and LWR metrology

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue I, 2005, Pages 192-203

  Boher, P ^a   Petit, J ^a   Leroux, T ^a   Foucher, J ^b   Desieres, Y ^b   Hazart, J ^b   Chaton, P ^b  

^a ELDIM   (France)

^b CEA GRENOBLE   (France)

Author keywords

AFM; Fourier optics; LER; Line edge roughness; Line width roughness; LWR; OFT; Scatterometry

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION; FOURIER OPTICS; FOURIER TRANSFORMS; LIGHTING;

AFM; LER; LINE EDGE ROUGHNESS; LINE WIDTH ROUGHNESS; LWR; OFT; SCATTEROMETRY;

LIGHT SCATTERING;

EID: 24644432953     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.594526     Document Type: Conference Paper

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