Scatterfield microscopy for extending the limits of image-based optical metrology

Applied Optics

Volumn 46, Issue 20, 2007, Pages 4248-4257

  Silver, Richard M ^a   Barnes, Bryan M ^a   Attota, Ravikiran ^a   Jun, Jay ^a   Stocker, Michael ^a   Marx, Egon ^a   Patrick, Heather J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EDGE DETECTION; FEATURE EXTRACTION; IMAGE RESOLUTION; MEASUREMENT THEORY; OPTICAL MICROSCOPY;

EDGE CONTRAST; OPTICAL METROLOGY; RAYLEIGH RESOLUTION CRITERION; SCATTERFIELD MICROSCOPY;

RAYLEIGH SCATTERING;

EID: 34548496725     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.004248     Document Type: Article

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