Scatterometry from crossed grating structures in different configurations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6617, Issue , 2007, Pages

  Schuster, Thomas ^a   Rafler, Stephan ^a   Osten, Wolfgang ^a   Reinig, Peter ^b   Hingst, Thomas ^b  

^a UNIVERSITY OF STUTTGART   (Germany)

^b QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

Author keywords

CD metrology; Crossed gratings; Generalized ellipsometry; Scatterometry

Indexed keywords

COMPUTER SIMULATION; DIFFRACTION GRATINGS; EMISSION SPECTROSCOPY; OPTICAL VARIABLES MEASUREMENT; PERIODIC STRUCTURES;

CD METROLOGY; CROSSED GRATINGS; GENERALIZED ELLIPSOMETRY; SCATTEROMETRY;

LIGHT SCATTERING;

EID: 36249028779     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726229     Document Type: Conference Paper

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