Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Materials Letters

Volumn 106, Issue , 2013, Pages 363-365

  Zhu, Ke ^a   Yang, Ye ^a   Wei, Tiefeng ^a   Tan, Ruiqin ^b   Cui, Ping ^a   Song, Weijie ^a   Choy, Kwang Leong ^c  

^a NINGBO INSTITUTE OF MATERIALS TECHNOLOGY AND ENGINEERING   (China)

^b NINGBO UNIVERSITY   (China)

^c UNIVERSITY OF NOTTINGHAM   (United Kingdom)

Author keywords

(HAZO); (PET); Electrical properties; Hydrogenated aluminum doped zinc oxide; Polyethylene terephthalate; Room temperature; Sputtering; Thin films

Indexed keywords

(HAZO); ALUMINUM-DOPED ZINC OXIDE; DC MAGNETRON SPUTTERING; ELECTRICAL AND OPTICAL PROPERTIES; HYDROGENATED ALUMINUMS; POLYETHYLENE TEREPHTHALATES (PET); ROOM TEMPERATURE; ROOM TEMPERATURE DC MAGNETRON SPUTTERING;

DEPOSITION; ELECTRIC PROPERTIES; HYDROGENATION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POLYETHYLENE TEREPHTHALATES; SPUTTERING; SURFACE ROUGHNESS; THIN FILMS; VAPOR DEPOSITION;

OPTICAL FILMS;

EID: 84879069865     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2013.05.063     Document Type: Article

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