New developments in gallium doped zinc oxide deposited on polymeric substrates by RF magnetron sputtering

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 20-25

  Fortunato, E ^a   Goncalves A ^a   Marques, A ^a   Viana, A ^b   Aguas H ^a   Pereira, L ^a   Ferreira, I ^a   Vilarinho, P ^c   Martins, R ^a  

^a UNIVERSIDADE NOVA DE LISBOA   (Portugal)

^b UNIVERSITY OF LISBON   (Portugal)

^c UNIVERSITY OF AVEIRO   (Portugal)

Author keywords

Gallium; Polymeric substrates; R.f. magnetron sputtering; Thin film; Transparent conductive oxide; Zinc oxide

Indexed keywords

DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; GALLIUM; HALL EFFECT; MAGNETRON SPUTTERING; MOISTURE; MORPHOLOGY; POLYMERS; THIN FILMS;

FILM THICKNESS; HALL MOBILITY;

ZINC COMPOUNDS;

SPUTTERING;

EID: 17044451049     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.025     Document Type: Article

References (9)

1. Young N.l.D. Trainor M.J. Yoon S.-Y. McCulloch D.J. Wilks R.W. Pearson A.et-al Mater. Res. Soc. Proc. 769 2003 H2.1.1
2. Cairns D.R. Paine D.C. Crawford G.P. Mater. Res. Soc. Proc. 266 2001 F3.24.1
3. Lewis B.G. Paine D.C. MRS Bull. 25 2000 22
4. Assunçao V. Fortunato E. Marques A. Águas H. Ferreira I. Costa M.E.V.et-al Thin Solid Films 427 2003 401
5. Fortunato E. Nunes P. Costa D. Brida D. Ferreira I. Martins R. Vacuum 64 2002 233
6. Hao X. Ma J. Zhang D. Yang T. Ma H. Yang Y. Cheng C. Huang J. Appl. Surf. Sci. 183 2001 137
7. E. Fortunato, V. Assunçao, A. Gonçalves, A. Marques, H. Águas, L. Pereira et al., this conference, symposium D
8. Park S.K. Han J.I. Kim W.K. Kwak M.G. Thin Solid Films 397 2001 49
9. Klug H.P. Alexander L. X-Ray Diffraction Procedures - For Polycrystalline and Amorphous Materials 2nd ed 1974 John Wiley and Sons New York