Transparent conductive ZnO:Al thin films deposited on flexible substrates prepared by direct current magnetron sputtering

Thin Solid Films

Volumn 497, Issue 1-2, 2006, Pages 20-23

  Pei, Z L ^a   Zhang, X B ^a   Zhang, G P ^a   Gong, J ^a   Sun, C ^a   Huang, R F ^a   Wen, L S ^a  

^a INSTITUTE OF METAL RESEARCH   (China)

Author keywords

Buffer layer; Sputtering; TCO; Zinc oxide

Indexed keywords

ALUMINUM; CONDUCTIVE FILMS; DEPOSITION; ELECTRIC CURRENTS; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; ZINC OXIDE;

BUFFER LAYER; FILM DEPOSITION; SHEET RESISTANCE; TCO;

THIN FILMS;

EID: 30344434995     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.09.110     Document Type: Article

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