Fabrication and characterization of transparent conductive ZnO: Al thin films deposited on polyethylene terephthalate substrates

Journal of the American Ceramic Society

Volumn 95, Issue 7, 2012, Pages 2140-2147

  Yang, Wei Jen ^a   Tsao, Chung Chen ^b   Hsu, Chun Yoa ^c   Chang, Hung Chih ^c   Chou, Chang Ping ^a   Kao, Jin Yih ^c  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b Tahua Institute of Technology   (Taiwan)

^c LUNGHWA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE STRENGTH; AL THIN FILMS; AZO FILMS; COATING TIME; DEPOSITION PARAMETERS; ELECTRICAL RESISTIVITY; GREY THEORY; OPTIMAL PARAMETER; PERFORMANCE CHARACTERISTICS; PET SUBSTRATE; PROCESS PARAMETERS; PULL-OFF; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-POWER; SPUTTERING PRESSURES; TRANSPARENT CONDUCTIVE; ZNO;

ALUMINUM; DEPOSITION RATES; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; OPACITY; OPTIMIZATION; POLYETHYLENE TEREPHTHALATES; TAGUCHI METHODS; THIN FILMS; VAPOR DEPOSITION; ZINC OXIDE;

SUBSTRATES;

EID: 84863724867     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2012.05178.x     Document Type: Article

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