Highly conductive and transparent Al-doped ZnO films on glass substrate via incorporating hydrogen at low substrate temperatures

Materials Letters

Volumn 74, Issue , 2012, Pages 96-99

  Zhou, H B ^a   Zhang, H Y ^a   Wang, Z G ^b   Tan, M L ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Al doped ZnO (AZO); Electrical properties; Magnetron sputtering; Structure; Transparent conducting films

Indexed keywords

AL-DOPED ZNO; AZO FILMS; CRYSTALLINITIES; ELECTRICAL AND OPTICAL PROPERTIES; FOUR-POINT PROBE MEASUREMENTS; GLASS SUBSTRATES; HIGH SUBSTRATE TEMPERATURE; HYDROGEN CONTENTS; HYDROGEN INCORPORATION; LOW SUBSTRATE TEMPERATURE; MICRO-STRUCTURAL; RF-MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPE; SUBSTRATE TEMPERATURE; SURFACE PROFILERS; TRANSPARENT CONDUCTING FILMS; VISIBLE RANGE;

ALUMINUM; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; HYDROGEN; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; STRUCTURE (COMPOSITION); X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

SUBSTRATES;

EID: 84862810115     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2012.01.034     Document Type: Article

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