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Volumn 85, Issue 2-3, 2001, Pages 212-217
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ZAO: An attractive potential substitute for ITO in flat display panels
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Author keywords
Reactive magnetron sputtering; Transparent conducting films; ZAO
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Indexed keywords
ALUMINUM;
CONDUCTIVE FILMS;
DEPOSITION;
DOPING (ADDITIVES);
ELECTRIC CONDUCTIVITY;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
INDIUM COMPOUNDS;
INFRARED RADIATION;
LIGHT REFLECTION;
LIGHT TRANSMISSION;
SUBSTRATES;
ULTRAVIOLET SPECTROSCOPY;
VISIBILITY;
ZINC OXIDE;
TRANSPARENT CONDUCTIVE FILMS;
FLAT PANEL DISPLAYS;
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EID: 0035934364
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(01)00584-0 Document Type: Article |
Times cited : (151)
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References (47)
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