SCOPUS 정보 검색 플랫폼

Volumn 519, Issue 22, 2011, Pages 7959-7965

Structural and optoelectronic properties of Al-doped zinc oxide films deposited on flexible substrates by radio frequency magnetron sputtering

(6) Tseng, C H a Huang, C H b Chang, H C b Chen, D Y c Chou, C P a Hsu, C Y b

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

b LUNGHWA UNIVERSITY OF SCIENCE AND TECHNOLOGY (Taiwan)

c HWA HSIA INSTITUTE OF TECHNOLOGY (Taiwan)

Author keywords

Buffer layer; Carrier concentration; Transparent conducting film; Zinc oxide

Indexed keywords

AL-DOPED ZINC OXIDE; AL-DOPED ZINC OXIDE FILMS; ARGON SPUTTERING; AZO FILMS; CERAMIC TARGET; FLEXIBLE SUBSTRATE; MICROSTRUCTURE CHARACTERISTICS; OPTOELECTRONIC PROPERTIES; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-POWER; TRANSPARENT CONDUCTING FILMS; VISIBLE RANGE;

ALUMINUM; BUFFER LAYERS; CARRIER CONCENTRATION; GALVANOMAGNETIC EFFECTS; HALL MOBILITY; MAGNETRON SPUTTERING; OPTICAL FILMS; POLYETHYLENE TEREPHTHALATES; RADIO; RADIO WAVES; ZINC; ZINC OXIDE;

OXIDE FILMS;

EID: 80052111489 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.05.017 Document Type: Article

Times cited : (31)

References (24)

1
- 36048972012
- B.D. Ahn, S.H. Oh, C.H. Lee, G.H. Kim, H.J. Kim, and S.Y. Lee J. Cryst. Growth 309 2007 128
- (2007) J. Cryst. Growth , vol.309 , pp. 128
- Ahn, B.D.¹ Oh, S.H.² Lee, C.H.³ Kim, G.H.⁴ Kim, H.J.⁵ Lee, S.Y.⁶

2
- 30344475820
- Y.M. Hu, C.W. Lin, and J.C.A. Huang Thin Solid Films 497 2006 130
- (2006) Thin Solid Films , vol.497 , pp. 130
- Hu, Y.M.¹ Lin, C.W.² Huang, J.C.A.³

3
- 77957224948
- C.Y. Hsu, Y.C. Lin, L.M. Kao, and Y.C. Lin Mater. Chem. Phys. 124 2010 330
- (2010) Mater. Chem. Phys. , vol.124 , pp. 330
- Hsu, C.Y.¹ Lin, Y.C.² Kao, L.M.³ Lin, Y.C.⁴

4
- 52949125612
- B. Houng, C.S. Hsi, B.Y. Hou, and S.L. Fu Vacuum 83 2009 534
- (2009) Vacuum , vol.83 , pp. 534
- Houng, B.¹ Hsi, C.S.² Hou, B.Y.³ Fu, S.L.⁴

5
- 15844366596
- H. Ko, W.P. Tai, K.C. Kim, S.H. Kim, S.J. Suh, and Y.S. Kim J. Cryst. Growth 277 2005 352
- (2005) J. Cryst. Growth , vol.277 , pp. 352
- Ko, H.¹ Tai, W.P.² Kim, K.C.³ Kim, S.H.⁴ Suh, S.J.⁵ Kim, Y.S.⁶

6
- 24644452505
- Y.M. Chung, C.S. Moon, M.J. Jung, and J.G. Han Surf. Coat. Technol. 200 2005 936
- (2005) Surf. Coat. Technol. , vol.200 , pp. 936
- Chung, Y.M.¹ Moon, C.S.² Jung, M.J.³ Han, J.G.⁴

7
- 61449209812
- A. Miyake, T. Yamada, H. Makino, N. Yamamoto, and T. Yamamoto Thin Solid Films 517 2009 3130
- (2009) Thin Solid Films , vol.517 , pp. 3130
- Miyake, A.¹ Yamada, T.² Makino, H.³ Yamamoto, N.⁴ Yamamoto, T.⁵

8
- 56649105239
- A. Miyake, T. Yamada, H. Makino, N. Yamamoto, and T. Yamamoto Thin Solid Films 517 2008 1037
- (2008) Thin Solid Films , vol.517 , pp. 1037
- Miyake, A.¹ Yamada, T.² Makino, H.³ Yamamoto, N.⁴ Yamamoto, T.⁵

9
- 0033716385
- D.H. Zhang, T.L. Yang, and J. Ma Appl. Surf. Sci. 158 2000 43
- (2000) Appl. Surf. Sci. , vol.158 , pp. 43
- Zhang, D.H.¹ Yang, T.L.² Ma, J.³

10
- 51749085079
- C.Y. Hsu, T.F. Ko, and Y.M. Huang J. Eur. Ceram. Soc. 28 2008 3065
- (2008) J. Eur. Ceram. Soc. , vol.28 , pp. 3065
- Hsu, C.Y.¹ Ko, T.F.² Huang, Y.M.³

11
- 0004272018
- Pearson/Prentice Hall Singapore 0-13-124-571-6
- R.C. Hibbeler Mechanics of Materials 2003 Pearson/Prentice Hall Singapore 0-13-124-571-6 24
- (2003) Mechanics of Materials , pp. 24
- Hibbeler, R.C.¹

12
- 33749987462
- L. Zhai, G. Ling, J. Li, and Y. Wang Mater. Lett. 60 2006 3031
- (2006) Mater. Lett. , vol.60 , pp. 3031
- Zhai, L.¹ Ling, G.² Li, J.³ Wang, Y.⁴

13
- 40849147309
- Q.B. Ma, Z.Z. Ye, H.P. He, L.P. Zhu, and B.H. Zhao Mater. Sci. Semicond. Process 10 2007 167
- (2007) Mater. Sci. Semicond. Process , vol.10 , pp. 167
- Ma, Q.B.¹ Ye, Z.Z.² He, H.P.³ Zhu, L.P.⁴ Zhao, B.H.⁵

14
- 38649130234
- J. Lee, H. Jung, J. Lee, D. Lim, K. Yang, J. Yi, and W.C. Song Thin Solid Films 516 2008 1634
- (2008) Thin Solid Films , vol.516 , pp. 1634
- Lee, J.¹ Jung, H.² Lee, J.³ Lim, D.⁴ Yang, K.⁵ Yi, J.⁶ Song, W.C.⁷

15
- 34247579135
- Q.B. Ma, Z.Z. Ye, H.P. He, S.H. Hu, J.R. Wang, L.P. Zhu, Y.Z. Zhang, and B.H. Zhao J. Cryst. Growth 304 2007 64
- (2007) J. Cryst. Growth , vol.304 , pp. 64
- Ma, Q.B.¹ Ye, Z.Z.² He, H.P.³ Hu, S.H.⁴ Wang, J.R.⁵ Zhu, L.P.⁶ Zhang, Y.Z.⁷ Zhao, B.H.⁸

16
- 76049113550
- K. Jang, H. Park, S. Jung, N.V. Duy, Y. Kim, J. Cho, H. Choi, T. Kwon, W. Lee, D. Gong, S. Park, J. Yi, D. Kim, and H. Kim Thin Solid Films 518 2010 2808
- (2010) Thin Solid Films , vol.518 , pp. 2808
- Jang, K.¹ Park, H.² Jung, S.³ Duy, N.V.⁴ Kim, Y.⁵ Cho, J.⁶ Choi, H.⁷ Kwon, T.⁸ Lee, W.⁹ Gong, D.¹⁰ Park, S.¹¹ Yi, J.¹² Kim, D.¹³ Kim, H.¹⁴

17
- 33751409058
- Y. Zhang, H. Zheng, J. Su, B. Lin, and Z. Fu J. Lumines. 124 2007 252
- (2007) J. Lumines. , vol.124 , pp. 252
- Zhang, Y.¹ Zheng, H.² Su, J.³ Lin, B.⁴ Fu, Z.⁵

18
- 68349105099
- J.Y. Tseng, Y.T. Chen, M.Y. Yang, C.Y. Wang, P.C. Li, W.C. Yu, Y.F. Hsu, and S.F. Wang Thin Solid Films 517 2009 6310
- (2009) Thin Solid Films , vol.517 , pp. 6310
- Tseng, J.Y.¹ Chen, Y.T.² Yang, M.Y.³ Wang, C.Y.⁴ Li, P.C.⁵ Yu, W.C.⁶ Hsu, Y.F.⁷ Wang, S.F.⁸

19
- 30344434995
- Z.L. Pei, X.B. Zhang, G.P. Zhang, J. Gong, C. Sun, R.F. Huang, and L.S. Wen Thin Solid Films 497 2006 20
- (2006) Thin Solid Films , vol.497 , pp. 20
- Pei, Z.L.¹ Zhang, X.B.² Zhang, G.P.³ Gong, J.⁴ Sun, C.⁵ Huang, R.F.⁶ Wen, L.S.⁷

20
- 0141748181
- E. Fortunato, A. Goncalves, V. Assuncao, A. Marques, H. Aguas, L. Pereira, I. Ferreira, and R. Martins Thin Solid Films 442 2003 121
- (2003) Thin Solid Films , vol.442 , pp. 121
- Fortunato, E.¹ Goncalves, A.² Assuncao, V.³ Marques, A.⁴ Aguas, H.⁵ Pereira, L.⁶ Ferreira, I.⁷ Martins, R.⁸

21
- 36048940658
- D.R. Sahu, and J.L. Huang Thin Solid Films 516 2007 208
- (2007) Thin Solid Films , vol.516 , pp. 208
- Sahu, D.R.¹ Huang, J.L.²

22
- 11444257247
- Z.B. Fang, Z.J. Yan, Y.S. Tan, X.Q. Liu, and Y.Y. Wang Appl. Surf. Sci. 241 2005 303
- (2005) Appl. Surf. Sci. , vol.241 , pp. 303
- Fang, Z.B.¹ Yan, Z.J.² Tan, Y.S.³ Liu, X.Q.⁴ Wang, Y.Y.⁵

23
- 33750438816
- D.R. Sahu, and J.L. Huang Thin Solid Films 515 2006 876
- (2006) Thin Solid Films , vol.515 , pp. 876
- Sahu, D.R.¹ Huang, J.L.²

24
- 68449085906
- Z. Ben Ayadi, L. El Mir, K. Djessas, and S. Alaya Thin Solid Films 517 2009 6305
- (2009) Thin Solid Films , vol.517 , pp. 6305
- Ben Ayadi, Z.¹ El Mir, L.² Djessas, K.³ Alaya, S.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.