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Volumn 518, Issue 20, 2010, Pages 5860-5865
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Deposition of Al-doped ZnO films on polyethylene naphthalate substrate with radio frequency magnetron sputtering
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Author keywords
Al doped zinc oxide; Atomic force microscopy; Flexible substrates; Optical properties; Polyethylene naphthalate; Radio frequency magnetron sputtering; Transparent conducting oxides; X ray diffraction
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Indexed keywords
AL-DOPED ZINC OXIDE;
FLEXIBLE SUBSTRATE;
FLEXIBLE SUBSTRATES;
POLYETHYLENE NAPHTHALATE;
RADIO FREQUENCY MAGNETRON SPUTTERING;
TRANSPARENT CONDUCTING OXIDE;
ALUMINUM;
ATOMIC FORCE MICROSCOPY;
DEPOSITION;
ELECTRIC CONDUCTIVITY;
GLASS;
MAGNETRON SPUTTERING;
METALLIC FILMS;
OPTICAL FILMS;
OPTICAL PROPERTIES;
POLYETHYLENES;
RADIO;
RADIO WAVES;
TARGETS;
THERMOPLASTICS;
X RAY DIFFRACTION;
ZINC;
ZINC OXIDE;
SUBSTRATES;
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EID: 77955428692
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2010.05.098 Document Type: Conference Paper |
Times cited : (48)
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References (33)
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