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Zhu, Y., Bazaei, A., Moheimani, S. O. R. & Yuce, M. R. A Micromachined Nanopositioner With On-Chip Electrothermal Actuation and Sensing. Ieee Electr Device L. 31, 1161-1163 (2010).
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(2010)
Ieee Electr Device L.
, vol.31
, pp. 1161-1163
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Zhu, Y.1
Bazaei, A.2
Moheimani, S.O.R.3
Yuce, M.R.4
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