Power-efficient high-speed and high-resolution capacitive-sensor interface for subnanometer displacement measurements

IEEE Transactions on Instrumentation and Measurement

Volumn 61, Issue 5, 2012, Pages 1315-1322

  Xia, Sha ^a   Nihtianov, Stoyan ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

Author keywords

Capacitive sensor; displacement measurement; sensor interface

Indexed keywords

CAPACITANCE-TO-VOLTAGE CONVERTERS; DYNAMIC RANGE; HIGH RESOLUTION; HIGH-SPEED; INTERFACE SOLUTION; MEASUREMENT RESULTS; MEASUREMENT SYSTEM; POWER EFFICIENT; SENSOR CAPACITANCE; SENSOR INTERFACE; SUB-NANOMETER DISPLACEMENTS;

CAPACITANCE; DISPLACEMENT MEASUREMENT; SENSORS;

CAPACITIVE SENSORS;

EID: 84859791065     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2011.2178678     Document Type: Conference Paper

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