An intelligent nano-positioning control system driven by an ultrasonic motor

International Journal of Precision Engineering and Manufacturing

Volumn 9, Issue 3, 2008, Pages 40-45

  Fan, Kuang Chao ^a   Lai, Zi Fa ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

FCMAC; LDGI; Nanopositioning; Ultrasonic motor

Indexed keywords

EID: 56549115323     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)

1. Mckeown, P., "Nanotechnology-Special article," Proc. of the Nano-metrology in Precision Engineering, pp. 5-55. 1998.
2. Juluri, B.K., Lin, W. and Lim, L., "Long range and high axial load capacity nanopositioner using single piezoelectric actuator and translating supports." International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 4, pp. 3-9, 2007.
3. Peng, Y. F., Wai, R. J. and Lin, C. M., "Implementation of LLCC-Resonant Driving Circuit and Adaptive CMAC Neural Network Control for Linear Piezoelectric Ceramic Motor," IEEE Trans. on Industrial Electronics, Vol. 51, No. 1, pp. 35-48, 2004.
4. Shyu, K. K. and Chang, C. Y., "Anti-windup Controller Design for Piezoelectric Ceramic Linear Ultrasonic Motor Drive," IECON Proceedings (Industrial Electronics Conference), Vol. 1, pp. 341-346, 2003.
5. Fan, K.C., Cheng, F. and Chen, Y.J., "Nanopositioning control on a commercial linear stage by software error compensation," Nanotechnology and Precision Engineering of China (ISSN 1672-6030), Vol. 4, No. 1, pp. 1-9, 2006.
6. Nishimura, T., Kubota, Y., Ishii, S., Ishizuka and Tsukiji S. M., "Encoder Incorporating a Displaceable Diffraction Grating," U. S. Patent No. 5038032, 1991.
7. Wu, C. C., Chen, Y. C., Lee, C. K., Hsieh, C. T., Wu, W. J. and Lu, S. S., "Design Verifications of a Linear Laser encoder with High Head-to-scale Tolerance," Proceedings of SPIE: The International Society for Optical Engineering, Vol. 3779, pp. 73-82, 1999.
8. Kimura, A., Gao, W. and Kiyono, S., "Design and Construction of a Surface Encoder with Dual Sine-Grids," International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 20-25, 2007.
9. Nanomotion Ltd. "AB2 driver user manual," P/N: AB02458000A, www.nanomotion.com, 2003.
10. Fan, K. C., Fei. Y. T., Yu, X. F., Chen, Y. J., Wang, W. L., Chen, F. and Liu, Y. S., "Development of a Low Cost Micro-CMM for 3D Micro/ nano Measurements," Measurement Science & Technology, Vol. 17, Issue 3, pp. 524-532, 2006.
11. Heydemann, P. L. M., "Determination and Correction of Quadrature Fringe Measurement Errors in Interferometers," Applied Opt., Vol. 20, No. 19, pp. 3382-3384, 1981.
12. Albus, J. S., "A New Approach to Manipulator Control: The Cerebellar Model. Articulation Controller (CMAC)," Journal of Dynamic System, Measurement and Control, Transaction of ASME, Vol. 97, Series G, No. 3, pp. 220-227, 1975.
13. Kwan, C. M., Xu, H., Lewis, F. L., Haynes, L. and Pryor, J. D., "Robust Spacecraft Attitude Control using Fuzzy CMAC," IEEE International Symposium on Intelligent Control, pp. 43-48, 1996.
14. Yin, S.N., Hwang, Y.T. and Yi, W., "Applying an artificial neural network to the control system for electrochemical gear-tooth profile modifications," International Journal of Precision Engineering and Manufacturing, Vol. 8, No.4, pp. 33-37, 2007.
15. Lin, F.J., Wai, R.J. and Chen, M.P., "Wavelet neural network control for linear ultrasonic motor drive via adaptive sliding-mode technique," IEEE TRANSACTIONS on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 50, No. 6, pp. 686-698, 2003.
16. Fan, K. C., Liu, C. L., Wu, P. T., Chen Y, C. and Wang, W. L., "The structure design of a micro-CMM with Abbé principle," Proc. of the 35th International Matador Conf., pp. 297-300, 2007.
17. Henmi, N. and Tanaka, M., "An open-loop method for point-to-point positioning of a piezoelectric actuator," International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 9-13, 2007.