Nanotube micro-opto-mechanical systems

Nanotechnology

Volumn 18, Issue 6, 2007, Pages

  Lu, Shaoxin ^a   Liu, Ye ^a   Shao, Ning ^a   Panchapakesan, Balaji ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MEMS; PHOTOLITHOGRAPHY; PLASMA ETCHING; WAFER BONDING;

ELECTROMECHANICAL ACTUATION; INFRARED LASERS; OPTICAL POWER CONSUMPTION; PHOTOMECHANICAL ACTUATION;

SINGLE CRYSTAL SURFACES;

NANOTUBE;

ARTICLE; CHEMICAL BOND; DISPLACEMENT BEHAVIOR; ELECTROCHEMISTRY; FILM; MOLECULAR PROBE; PHOTOCHEMISTRY; PRIORITY JOURNAL;

EID: 33947520731     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/6/065501     Document Type: Article

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