A micromachined nanopositioner with on-chip electrothermal actuation and sensing

IEEE Electron Device Letters

Volumn 31, Issue 10, 2010, Pages 1161-1163

  Zhu, Y ^a   Bazaei, A ^a   Moheimani, S O R ^a   Yuce, M R ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Feedback control; microelectromechanical systems (MEMS); nanopositioning; thermal actuation; thermal position sensing

Indexed keywords

CLOSED-LOOP; CONTROL CAPABILITIES; DISPLACEMENT SENSING; DYNAMIC RANGE; ELECTROTHERMAL ACTUATION; FEEDBACK CONTROLLER; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINED; NANO-POSITIONER; NANO-POSITIONING; ON CHIPS; POSITION SENSING; PROPORTIONAL-INTEGRAL; SENSING SCHEMES; SENSOR DRIFT; SINGLE CHIPS; THERMAL ACTUATION; TIME CONSTANTS;

FEEDBACK CONTROL; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES;

COMPOSITE MICROMECHANICS;

EID: 77957587418     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2010.2058841     Document Type: Article

References (14)

1. G. Binning and H. Rohrer, "The scanning tunneling microscope," Sci. Amer., vol.253, pp. 50-56, 1986.
2. G. Binning, C. Quate, and C. Gerber, "Atomic force microscope," Phys. Rev. Lett., vol.56, no.9, pp. 930-933, Mar. 1986.
3. N. B. Hubbard,M. L. Culpepper, and L. L. Howell, "Actuators for micropositioners and nanopositioners," Appl. Mech. Rev., vol.59, no.6, pp. 324-334, Nov. 2006.
4. A. Pantazi, M. A. Lantz, G. Cherubini, H. Pozidis, and E. Eleftheriou, "A servomechanism for a micro-electro-mechanical-system-based scanning-probe data storage device," Nanotechonology, vol.15, no.10, pp. S612-S621, Oct. 2004.
5. S. Devasia, E. Eleftheriou, and S. O. R. Moheimani, "A survey of control issues in nanopositioning," IEEE Trans. Control Syst. Technol., vol.15, no.5, pp. 802-823, Sep. 2007.
6. J. J. Gorman, Y-S. Kim, and N. G. Dagalakis, "Control of MEMS nanopositioners with nano-scale resolution," in Proc. IMECE, Chicago, IL, Nov. 5-10, 2006.
7. R. Hichey, D. Sameoto, T. Hubbard, and M. Kujath, "Time and frequency response of two-arm micromachined thermal actuators," J. Micromech. Microeng., vol.13, no.1, pp. 40-46, 2003.
8. Y. Sun, M. A. Greminger, D. P. Potasek, and B. J. Nelson, "A visually servoed MEMS manipulator," in Experimental Robotics VIII. Berlin, Germany: Springer-Verlag, 2003, pp. 255-264.
9. L. L. Chu and Y. B. Gianchandani, "A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing," J. Micromech. Microeng., vol.13, no.2, pp. 279-285, Mar. 2003.
10. M. A. Lantz, G. K. Binning, M. Despont, and U. Drechsler, "A micromechanical thermal displacement sensor with nanometre resolution," Nanotechnology, vol.16, no.8, pp. 1089-1094, 2005.
11. A. Sebastian, A. Pantazi, S. O. R. Moheimani, H. Pozidis, and E. Eleftheriou, "Achieving subnanometer precision in a MEMS-based storage device during self-servo write process," IEEE Trans. Nanotechnol., vol.7, no.5, pp. 586-595, Sep. 2008.
12. M. A. Lantz, H. E. Rothuizen, U. Drechsler,W. Haberle, and M. Despont, "A vibration resistant nanopositioner for mobile parallel-probe storage applications," J. Microelectromech. Syst., vol.16, no.1, pp. 130-139, Feb. 2007.
13. V. Kaajakari, Practical MEMS. Las Vegas, NV: Small Gear Publishing, 2009.
14. Online. Available: http://www.memscap.com/en-mumps.html