Local probe microscopy with interferometric monitoring of the stage nanopositioning

Measurement Science and Technology

Volumn 20, Issue 8, 2009, Pages

  Lazar, J ^a   Klapetek, P ^b   Cip O ^a   Ciek M ^a   Sery M ^a  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

^b CZECH METROLOGY INSTITUTE   (Czech Republic)

Author keywords

Atomic force microscopy (AFM); Interferometry; Local probe microscopy; Nanometrology; Nanopositioning interferometry; Nanoscale; Surface probe microscopy (SPM)

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITIVE SENSORS; DEGREES OF FREEDOM (MECHANICS); NANOTECHNOLOGY; PROBES;

LOCAL PROBES; NANO SCALE; NANO-POSITIONING; NANOMETROLOGY; SURFACE PROBE MICROSCOPY;

INTERFEROMETRY;

EID: 70350672536     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/8/084007     Document Type: Article

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