All-optical micromirrors from nanotube MOMS with wavelength selectivity

Journal of Microelectromechanical Systems

Volumn 16, Issue 6, 2007, Pages 1515-1523

  Lu, Shaoxin ^a   Panchapakesan, Balaji ^b  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b UNIVERSITY OF DELAWARE   (United States)

Author keywords

Carbon nanotubes; Carbon nanotubes (CNTs); Micromirror; Micromirrors; Microoptics; Microoptomechanical system (MOMS); Photomechanical actuation

Indexed keywords

CARBON NANOTUBES; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; MIRRORS; OPTICAL FILTERS; PLASMA ETCHING;

ALL-OPTICAL MICROMIRRORS; LASER ILLUMINATION; PHOTOMECHANICAL ACTUATION;

MICROACTUATORS;

EID: 36949030837     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.908950     Document Type: Article

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