Piezo-driven metrological multiaxis nanopositioner

Review of Scientific Instruments

Volumn 72, Issue 11, 2001, Pages 4183-

  Shim, Jong Youp ^a   Gweon, Dae Gab ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

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Indexed keywords

EID: 0035503836     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1408932     Document Type: Article

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