Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometry

Control Engineering Practice

Volumn 13, Issue 5, 2005, Pages 559-566

  Yeh, Hsien Chi ^a,b   Ni, Wei Tou ^b   Pan, Sheau Shi ^c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Crosstalk interference; Digital control; Feedback control; Measuring elements; Mechanism; Positioning system

Indexed keywords

ALGORITHMS; CLOSED LOOP CONTROL SYSTEMS; CORRELATION METHODS; CROSSTALK; FEEDBACK CONTROL; INTERFEROMETRY; LASER BEAM EFFECTS; MATRIX ALGEBRA; SCANNING TUNNELING MICROSCOPY;

DIGITAL CLOSED-LOOP NANOPOSITIONING; DIGITAL FEEDBACK CONTROL; LASER INTERFEROMETRY; RECTILINEAR FLEXURE STAGE; SCANNING PROBE MICROSCOPY;

DIGITAL CONTROL SYSTEMS;

CONTROL;

EID: 13144274586     PISSN: 09670661     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.conengprac.2004.04.019     Document Type: Article

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