Ultrasonic actuators for nanometre positioning

Ultrasonics

Volumn 38, Issue 1, 2000, Pages 20-25

  Snitka, Valentinas ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ACTUATORS; ALGORITHMS; COMPUTER CONTROL; FEEDBACK CONTROL; IDENTIFICATION (CONTROL SYSTEMS); LINEAR MOTORS; POSITION CONTROL; VIBRATIONS (MECHANICAL);

NANOPOSITIONING; ULTRASONIC MOTORS;

ULTRASONIC DEVICES;

EID: 0033885894     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0041-624X(99)00086-4     Document Type: Article

References (11)

1. Burleigh Instruments, US Patent 3,902,084, 1975.
2. Koster M.P. Conf. Proc., Actuator 94, June 15-17. 1994;Axon Technologie Consult GmbH, Bremen.
3. Akiyama Y. JEE. 3:1987;76-80.
4. Ueha S., Tomikava Y., Kurosawa M., Nakamura N. Ultrasonic Motors, Theory and Applications. 1993;297 Clarendon Press, Oxford.
5. Snitka V., Mizariene V., Zukauskas D. Ultrasonics. 34:1996;247-250.
6. Bansevicius R., Ragulskis K., Kurilo R. Proc. IV World Congress on the Theory of Machines and Mechanisms, Newcastle-upon-Tyne, UK. 1975;18-24.
7. V. Snitka, Development of precision positioning methods and tools based on ultrasonic motors and sensors, Dr. Sc. dissertation, Moscow Institute of Electronic Engineering, 1990, p. 518 (in Russian).
8. Nanomotion Ltd., Ceramic motor, US Patent 5,453,653, 1995.
9. Amerstring-Helouvry B., Dupone P., Canudas de Wit C. Automatica. 30:(7):1994;1083-1138.
10. Dupont P.E., Dunlop E.P. J. Dynamic Systems, Measurement and Control. 117:1995;8-14.
11. Kaminskas V. Dynamic System Identification Via Discrete-time Observations :1982;Mokslas, Vilnius. (in Russian).