Research on optimization of the hot embossing process

Journal of Micromechanics and Microengineering

Volumn 17, Issue 12, 2007, Pages 2420-2425

  He, Yong ^a   Fu, Jian Zhong ^a   Chen, Zi Chen ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMPUTER SIMULATION; OPTIMIZATION; TOPOLOGY;

HOT EMBOSSING; PATTERN DISTORTION;

FINITE ELEMENT METHOD;

EID: 36949035773     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/12/005     Document Type: Article

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