-
1
-
-
0020127035
-
Silicon as a mechanical material
-
Peterson K E 1982 Silicon as a mechanical material Proc. IEEE 70 420-57
-
(1982)
Proc. IEEE
, vol.70
, pp. 420-457
-
-
Peterson, K.E.1
-
5
-
-
0029392940
-
The liga technique and its potential for microsystems - A survey
-
Bacher W, Menz W and Mohr J 1995 The liga technique and its potential for microsystems - a survey IEEE Trans. Indust. Electron. 42 431-41
-
(1995)
IEEE Trans. Indust. Electron.
, vol.42
, pp. 431-441
-
-
Bacher, W.1
Menz, W.2
Mohr, J.3
-
7
-
-
0001743505
-
Fabrication of microlenses by plasmaless isotropic etching combined with plastic moulding
-
Kohler U, Guber A E, Bier W and Heckele W 1996 Fabrication of microlenses by plasmaless isotropic etching combined with plastic moulding Sensors Actuators A 53 361-3
-
(1996)
Sensors Actuators A
, vol.53
, pp. 361-363
-
-
Kohler, U.1
Guber, A.E.2
Bier, W.3
Heckele, W.4
-
8
-
-
0029696877
-
Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic-molding
-
Kohler U, Guber A E, Bier W, Heckele W and Schaller Th 1996 Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic-molding Proc. SPIE 2687 18-22
-
(1996)
Proc. SPIE
, vol.2687
, pp. 18-22
-
-
Kohler, U.1
Guber, A.E.2
Bier, W.3
Heckele, W.4
Schaller, Th.5
-
9
-
-
0030648185
-
Silicon based replication technology of 3d-microstructures by conventional cd-injection molding techniques
-
Larsson O, Ohman O, Billman A, Lundbladh E, Lindell C and Palmskog G 1997 Silicon based replication technology of 3d-microstructures by conventional cd-injection molding techniques Proc. 9th Int. Conf. on Solid-State Sensors and Actuators, Transducers '97 pp 1415-18
-
(1997)
Proc. 9th Int. Conf. on Solid-state Sensors and Actuators, Transducers '97
, pp. 1415-1418
-
-
Larsson, O.1
Ohman, O.2
Billman, A.3
Lundbladh, E.4
Lindell, C.5
Palmskog, G.6
-
10
-
-
0001025889
-
Comparative study of hot embossed microstructures fabricated by laboratory and commercial environments
-
Liwei Lin, Cheng Y T and Chiu C-J 1998 Comparative study of hot embossed microstructures fabricated by laboratory and commercial environments Microsyst. Technol. J. 4 113-16
-
(1998)
Microsyst. Technol. J.
, vol.4
, pp. 113-116
-
-
Lin, L.1
Cheng, Y.T.2
Chiu, C.-J.3
-
11
-
-
0030651940
-
Valve-less diffuser micropumps fabricated using thermoplastic replication
-
Olsson A et al 1997 Valve-less diffuser micropumps fabricated using thermoplastic replication Proc. IEEE Electro Mechanical Systems (MEMS97) pp 305-10
-
(1997)
Proc. IEEE Electro Mechanical Systems (MEMS97)
, pp. 305-310
-
-
Olsson, A.1
-
12
-
-
0018030083
-
Fabrication of novel three-dimensional microstructures by the anisotropic etching of (100) and (110) silicon
-
Bassous B 1978 Fabrication of novel three-dimensional microstructures by the anisotropic etching of (100) and (110) silicon IEEE Trans. Electron Devices 25 1178-85
-
(1978)
IEEE Trans. Electron Devices
, vol.25
, pp. 1178-1185
-
-
Bassous, B.1
-
14
-
-
0004038250
-
-
Reading, MA: Addison-Wesley
-
Hecht E 1989 Optics 2nd edn (Reading, MA: Addison-Wesley)
-
(1989)
Optics 2nd Edn
-
-
Hecht, E.1
-
15
-
-
0343038549
-
-
Tainan, Taiwan
-
Super Optics Development Co, Etd 1986 Electro Luminescent Lamp (Tainan, Taiwan)
-
(1986)
Electro Luminescent Lamp
-
-
-
16
-
-
0029429020
-
Fabrication of 45 mirrors together with well-defined v-grooves using wet anisotropic etching of silicon
-
Strandman C, Rosengren E, Elderstig H G A and Backlund Y 1995 Fabrication of 45 mirrors together with well-defined v-grooves using wet anisotropic etching of silicon J. Microelectromech. Syst. 4 213-19
-
(1995)
J. Microelectromech. Syst.
, vol.4
, pp. 213-219
-
-
Strandman, C.1
Rosengren, E.2
Elderstig, H.G.A.3
Backlund, Y.4
|