Fabrication and electromechanical actuation of epitaxial SrTiO3 (0 0 1) microcantilevers

Journal of Micromechanics and Microengineering

Volumn 23, Issue 3, 2013, Pages

  Biasotti, Michele ^a,b   Pellegrino, Luca ^b   Buzio, Renato ^b   Bellingeri, Emilio ^b   Bernini, Cristina ^b   Siri, Antonio Sergio ^a,b   Marré, Daniele ^a,b  

^a UNIVERSITY OF GENOA   (Italy)

^b CNR SPIN   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FORCES; DIELECTRIC OXIDES; ELECTRO-MECHANICAL ACTUATIONS; ELECTROSTATIC ACTUATION; MECHANICAL ANALYSIS; MECHANICAL CHARACTERIZATIONS; MICRO-CANTILEVERS; SRTIO;

COMPOSITE MICROMECHANICS; ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD;

DIELECTRIC MATERIALS;

EID: 84878161733     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/3/035031     Document Type: Article

References (53)

1. Arlett J L and Roukes M L 2010 J. Appl. Phys. 108 084701
2. Persano A, Quaranta F, Martucci M C, Cretì P, Siciliano P and Cola A 2010 J. Appl. Phys. 107 114502
3. Singamaneni S et al 2008 Adv. Mater. 20 653-80
4. Lang H P, Baller M K, Berger R, Gerber Ch, Gimzewski J K, Battiston F M, Fornaro P, Ramseyer J P, Meyer E and Guntherodt H J 1999 Anal. Chim. Acta 393 59-65 (Pubitemid 29335991)
5. Li M, Tang H X and Roukes M L 2007 Nature Nanotechnol. 2 114-120 (Pubitemid 46226371)
6. Fantner G E et al 2006 Ultramicroscopy 106 881-7 (Pubitemid 43994331)
7. Hughes W L and Wang Z L 2003 Appl. Phys. Lett. 82 2886
8. Craighead H G 2000 Science 290 1532-5
9. Adami A, Decarli M, Bartali R, Micheli V, Laidani N and Lorenzelli L 2010 Rev. Sci. Instrum. 81 015109
10. Biasotti M, Pellegrino L, Bellingeri E, Manca N, Siri A S and Marrè D 2010 Appl. Phys. Lett. 97 223503
11. Maluf N and Williams K 2004 An Introduction to Microelectromechanical Systems Engineering 2nd edn (Boston, MA: Artech House Microelectromechanical Library)
12. Beeby S, Ensell G, Kraft M and White N 2004 MEMS Mechanical Sensors (Boston, MA: Artech House Inc.)
13. Malavé A and Oesterschulze E 2006 Rev. Sci. Instrum. 77 043708
14. Minne S, Manalis S and Quate C 1995 Appl. Phys. Lett. 67 3819
15. Itoh T, Lee C and Suga T 1996 Appl. Phys. Lett. 69 2036-8
16. Lavrik N V, Sepaniak M J and Datskos P G 2004 Rev. Sci. Instrum. 75 2229-53
17. Raiteri R, Grattarola M, Butt H J and Sklàdal P 2001 Sensors Actuators B 79 115-26 (Pubitemid 32866876)
18. Schlom D G, Chen L-Q, Pan X, Schmehl A and Zurbuchen M A 2008 J. Am. Ceram. Soc. 91 2429-54
19. Mannhart J and Schlom D G 2010 Science 327 1607
20. McKee R A, Walker F J and Chisholm M F 1998 Phys. Rev. Lett. 81 3014-7
21. Shih W-C and Yang W-H 2010 Physica B 405 234-8
22. Méchin L, Villégier J-C and Bloyet D 1997 J. Appl. Phys. 81 7039
23. Kim J H and Grishin A M 2005 Appl. Phys. Lett. 87 033502 (Pubitemid 41227638)
24. Jang H W, Baek S H, Ortiz D, Folkman C M, Eom C B, Chu Y H, Shafer P, Ramesh R, Vaithyanathan V and Schlom D G 2008 Appl. Phys. Lett. 92 062910 (Pubitemid 351263840)
25. Baek S H et al 2011 Science 334 958-61
26. Isarakorn D, Sambri A, Janphuang P, Briand D, Gariglio S, Triscone J-M, Guy F, Reiner J W, Ahn C H and de Rooij N F 2010 J. Micromech. Microeng. 20 055008
27. Nguyen M D, Nazeer H, Karakaya K, Pham S V, Steenwelle R, Dekkers M, Abelmann L, Blank D H A and Rijnders G 2010 J. Micromech. Microeng. 20 085022
28. Kanno I, Fujii S, Kamada T and Takayama R 1997 Appl. Phys. Lett. 70 1378
29. Pellegrino L, Biasotti M, Bellingeri E, Bernini C, Siri A S and Marrè D 2009 Adv. Mater. 21 2377-81
30. Biasotti M, Pellegrino L, Bellingeri B, Bernini C, Siri A S and Marrè D 2009 Procedia Chem. 1 839-42
31. Deneke C, Wild E, Boldyreva K, Baunack S, Cendula P, Mönch I, Simon M, Malachias A, Dörr K and Schmidt O G 2011 Nanoscale Res. Lett. 6 621
32. Pellegrino L, Manca N, Kanki T, Tanaka H, Biasotti M, Bellingeri E, Siri A S and Marré D 2012 Adv. Mater. 24 2929-34
33. Van Benthem K, Elsasser C and French R H 2001 J. Appl. Phys. 90 6156 (Pubitemid 34046774)
34. Müller K A and Burkard H 1979 Phys. Rev. B 19 3593
35. Neville R C, Hoeneisen B and Mead C A 1972 J. Appl. Phys. 43 2124
36. Barrett J H 1952 Phys. Rev. 86 118
37. Christen H-M, Mannhart J, Williams E J and Gerber Ch 1994 Phys. Rev. B 49 12095
38. Kan D et al 2005 Nature Mater. 4 816-9
39. Liu X Z, Tao B W and Li Y R 2007 J. Mater. Sci. 42 389-92 (Pubitemid 46154481)
40. Jang H W et al 2010 Phys. Rev. Lett. 104 197601
41. Fuchs D, Schneider C W, Schneider R and Rietschel H 1999 J. Appl. Phys. 85 7362
42. Haeni J H et al 2004 Nature 430 758-61 (Pubitemid 39071342)
43. Bernard O, Andrieux M, Poissonnet S and Huntz A-M 2004 J. Eur. Ceram. Soc. 24 763-73 (Pubitemid 37425374)
44. Ledbetter H, Lei M and Kim S 1990 Phase Transit. 23 61
45. Kityk A V, Schranz W, Sondergeld P, Havlik D, Salje E K H and Scott J F 2000 Europhys. Lett. 50 41-7
46. Stöcker H, Zschornak M, Leisegang T, Shakhverdova I, Gemming S and Meyer D C 2010 Cryst. Res. Technol. 45 13-7
47. Paufler P, Bergk B, Reibold M, Belger A, Pätzke N and Meyer D C 2006 Solid State Sci. 8 782-92
48. Sadeghian H, Yang C K, Goosen J F L, van der Drift E, Bossche A, French P J and van Keulen F 2009 Appl. Phys. Lett. 94 221903
49. Butt H-J, Cappella B and Kappl M 2005 Surf. Sci. Rep. 59 1 (Pubitemid 41594664)
50. Maivaldt P, Butt H-J, Gould S A C and Prater C B 1991 Nanotechnology 2 103
51. Gibson C T, Smith D S and Roberts J 2005 Nanotechnology 16 234 (Pubitemid 40274849)
52. Vinzelberg S Atomic Force F&E GmbH 2010 private communication
53. Allen J J 2005 Micro Electro Mechanical System Design 1st edn (Boca Raton, FL: CRC Press) pp 273-93