SCOPUS 정보 검색 플랫폼

Review of Scientific Instruments

Volumn 81, Issue 1, 2010, Pages

Mechanical characterization of thin TiO2 films by means of microelectromechanical systems-based cantilevers

(6) Adami, A a Decarli, M a Bartali, R a Micheli, V a Laidani, N a Lorenzelli, L a

a FONDAZIONE BRUNO KESSLER (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

GEOMETRICAL PARAMETERS; MECHANICAL CHARACTERIZATIONS; MECHANICAL PARAMETERS; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-CANTILEVERS; MICRO-FABRICATION TECHNOLOGY; MICRO-SCRATCH TEST; MICROELECTROMECHANICAL SYSTEMS; MORPHOLOGICAL PROPERTIES; NUMERICAL MODELS; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTIVE SENSING; PROFILOMETERS; RF PLASMA; SILICON CANTILEVER; SILICON MICROCANTILEVERS; TIO; YOUNG'S MODULUS;

CHEMICAL SENSORS; ELASTIC MODULI; ELASTICITY; ELECTRIC DISCHARGES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; RESIDUAL STRESSES; TITANIUM; TITANIUM DIOXIDE; X RAY DIFFRACTION ANALYSIS;

COMPOSITE MICROMECHANICS;

EID: 75749115211 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3292942 Document Type: Review

Times cited : (10)

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