Deflection detection and feedback actuation using a self-excited piezoelectric Pb(Zr,Ti)O3 microcantilever for dynamic scanning force microscopy

Applied Physics Letters

Volumn 69, Issue 14, 1996, Pages 2036-2038

  Itoh, T ^a   Lee, C ^a,b   Suga, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001105231     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116871     Document Type: Article

References (15)

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