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Volumn 87, Issue 3, 2005, Pages
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Free-standing epitaxial La 1-x (Sr,Ca) xMn O 3 membrane on Si for uncooled infrared microbolometer
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Author keywords
[No Author keywords available]
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Indexed keywords
EPITAXIAL COLOSSALS;
FREE-STANDING MEMBRANES;
INFRARED MICROBOLOMETERS;
MANGANITE FILMS;
ETCHING;
ION BEAMS;
MAGNETORESISTANCE;
PLASMAS;
PULSED LASER DEPOSITION;
SILICON WAFERS;
THIN FILMS;
LANTHANUM COMPOUNDS;
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EID: 24144441232
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1996845 Document Type: Article |
Times cited : (47)
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References (18)
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