All-Oxide Crystalline Microelectromechanical systems

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 839-842

  Biasotti, M ^a,b   Pellegrino, L ^a   Bellingeri, E ^a   Bernini, C ^a   Siri, A S ^a,b   Marre D ^a,b  

^a Laboratory of Innovative and Artificial Materials Genoa   (Italy)

^b UNIVERSITY OF GENOA   (Italy)

Author keywords

MEMS; Strain; Strain device; Transition metal Oxide

Indexed keywords

APPLIED STRAIN; CRYSTALLINE OXIDES; FLEXIBLE SUBSTRATE; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-CANTILEVERS; MICROELECTROMECHANICAL SYSTEMS; SRTIO; TRANSITION METAL OXIDE; TRANSITION-METAL OXIDES; TRIANGULAR GEOMETRY; UPPER SURFACE;

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; CRYSTALLINE MATERIALS; DEPOSITION; EPITAXIAL FILMS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OXIDE FILMS; STRONTIUM ALLOYS; TRANSITION METAL COMPOUNDS; TRANSITION METALS;

TENSILE STRAIN;

EID: 71549154673     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.209     Document Type: Conference Paper

References (13)

1. Schlom D.G., et al. A Thin Film Approach to Engineering Functionality into Oxides. J. Am. Ceram. Soc. 91 (2008) 2429-2454
2. Ahn C.H., Triscone J.-M., and Mannhart J. Electric field effect in correlated oxide systems. Nature 424 (2003) 1015
3. Pallecchi I., Pellegrino L., Bellingeri E., Siri A.S., and Marré D. Reversible shift of the transition temperature of manganites in planar field-effect devices patterned by atomic force microscope. Appl. Phys. Lett. 83 (2003) 4435-4437
4. 3 (001) films. Appl. Phys. Lett. 87 (2005) 262502
5. 3 Films. Phys. Rev. Lett. 100 (2008) 076401
6. Méchin L., Villégier J.-C., and Bloyet D. suspended epitaxial YbaCuO microbolometers fabrciated by silicon micromachining : modeling and measurements. J. Appl. Phys. 81 (1997) 7039
7. 3 membrane on Si for uncooled infrared microbolometer. Appl. Phys. Lett. 87 (2005) 033502
8. 3 membranes with substantially reduced fatigue and leakage. Appl. Phys. Lett. 92 (2008) 062910
9. Jeon Y.B., Sood R., Jeong J.-h., and Kim S.-G. MEMS power generator with transverse mode thin film PZT. Sensors and Actuators A 122 (2005) 16-22
10. L. Pellegrino, M. Biasotti, A. S. Siri, Patent ITA TO2008A000257, EU patent application 09156790.9 - 1528
11. Pellegrino L., Biasotti M., Bellingeri E., Bernini C., Siri A.S., and Marrè D. All-oxide crystalline micro-electromechanical systems: bending the functionalities of transition-metal oxide thin films. Adv. Mater. 21 (2009) 2377-2381
12. Comsol Multiphysics version 3.4
13. Infante I.C., et al. Elastic and orbital effects on thickness-dependent properties of manganite thin films. Phys. Rev. B 76 (2007) 224415