All-diamond cantilever probes for scanning probe microscopy applications realized by a proximity lithography process

Review of Scientific Instruments

Volumn 77, Issue 4, 2006, Pages

  Malava A ^a,c   Oesterschulze, E ^a,b  

^a UNIVERSITY OF KASSEL   (Germany)

^b Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

^c CENTER OF ADVANCED EUROPEAN STUDIES AND RESEARCH CAESAR   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; CHEMICAL VAPOR DEPOSITION; DIAMONDS; LITHOGRAPHY; OPTICAL MICROSCOPY; RESONANCE;

ALL-DIAMOND PROBES; POLYCRYSTALLINE DIAMOND; SCANNING PROBE MICROSCOPY;

PLASMA PROBES;

EID: 33646417347     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2194478     Document Type: Article

References (18)

1. Ph. Niedermann, W. Hänni, N. Blanc, R. Christoph, and J. Burger, J. Vac. Sci. Technol. A 14, 1233 (1996).
2. E. Oesterschulze, W. Scholz, C. Mihalcea, D. Albert, B. Sobisch, and W. Kulisch, Appl. Phys. Lett. 70, 435 (1997).
3. A. Malavá, E. Oesterschulze, W. Kulisch, T. Trenkler, T. Hantschel, and W. Vandervorst, Diamond Relat. Mater. 8, 283 (1999).
4. T. Trenkler, J. Vac. Sci. Technol. B 18, 418 (2000).
5. T. Hantschel, T. Trenkler, W. Vandervorst, A. Malavá, D. Büchel, W. Kulisch, and E. Oesterschulze, Microelectron. Eng. 46, 113 (1999).
6. P. Gluche, Diamond Relat. Mater. 7, 779 (1998).
7. S. Akamine, R. C. Barrett, and C. F. Quate, Appl. Phys. Lett. 57, 316 (1990).
8. Ph. Niedermann, W. Hänni, D. Morel, A. Perret, N. Skinner, P. F. Indermühle, N. F. de Rooij, and P. A. Buffat, Appl. Phys. A: Mater. Sci. Process. 66, S31 (1998).
9. C. Mihalcea, W. Scholz, A. Malavá, D. Albert, W. Kulisch, and E. Oesterschulze, Appl. Phys. A: Mater. Sci. Process. 66, S87 (1998).
10. T. Hantschel, P. Niedermann, T. Trenkler, and W. Vandervorst, Appl. Phys. Lett. 76, 1603 (2000).
11. D. Álvarez, M. Fouchier, J. Kretz, J. Hartwich, S. Schoemann, and W. Vandervorst, Microelectron. Eng. 73-74, 910 (2004).
12. C. Beuret, T. Akiyama, U. Staufer, N. F. de Rooij, P. Niedermann, and W. Hänni, Appl. Phys. Lett. 76, 1621 (1998).
13. W. Scholz, D. Albert, A. Malavá, S. Werner, Ch. Mihalcea, W. Kulisch, and E. Oesterschulze, Proc. SPIE 3009-09, 61 (1997).
14. E. Oesterschulze and R. Kassing, Patent No. WO 0125720 (pending).
15. D. Sarid, Scanning Force Microscopy (Oxford University Press, New York, 1991).
16. J. Regul, Appl. Phys. Lett. 81, 2023 (2002).
17. Tapping-mode probes made by Nanosensors.
18. S. S. Sheiko, M. Möller, E. M. C. M. Reuvekamp, and H. W. Zandbergen, Phys. Rev. B 48, 5657 (1993).