메뉴 건너뛰기




Volumn 13, Issue 5, 2013, Pages 5478-5492

Flexible PZT thin film tactile sensor for biomedical monitoring

Author keywords

Biomedical; PZT thin film; Sensor; Sol gel

Indexed keywords

SOL-GEL PROCESS; SOL-GELS;

EID: 84877656391     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s130505478     Document Type: Article
Times cited : (55)

References (47)
  • 1
    • 79961063510 scopus 로고    scopus 로고
    • Proposal and development of arrayed sole sensor for legged robot and contact force detection using neural networks
    • Aoyagi, S.; Matsuda, T.; Kong, T.-W.; Ishimaru, T.; Suzuki, M.; Inoue, K. Proposal and development of arrayed sole sensor for legged robot and contact force detection using neural networks. IEEE Sens. J. 2011, 11, 2048-2056.
    • (2011) IEEE Sens. J , vol.11 , pp. 2048-2056
    • Aoyagi, S.1    Matsuda, T.2    Kong, T.-W.3    Ishimaru, T.4    Suzuki, M.5    Inoue, K.6
  • 3
    • 84863198618 scopus 로고    scopus 로고
    • An annular mechanical temperature compensation structure for gas-sealed capacitive pressure sensor
    • Hao, X.; Jiang, Y.; Takao, H.; Maenaka, K.; Higuchi, K. An annular mechanical temperature compensation structure for gas-sealed capacitive pressure sensor. Sensors 2012, 12, 8026-8038.
    • (2012) Sensors , vol.12 , pp. 8026-8038
    • Hao, X.1    Jiang, Y.2    Takao, H.3    Maenaka, K.4    Higuchi, K.5
  • 4
    • 0032288370 scopus 로고    scopus 로고
    • Design and implementation of capacitive proximity sensor using microelectromechanical systems technology
    • Chen, Z.H.; Luo, R.C. Design and implementation of capacitive proximity sensor using microelectromechanical systems technology. IEEE Trans. Ind. Electron. 1998, 45, 886-894.
    • (1998) IEEE Trans. Ind. Electron , vol.45 , pp. 886-894
    • Chen, Z.H.1    Luo, R.C.2
  • 5
    • 70350647512 scopus 로고    scopus 로고
    • A flexible capacitive tactile sensing array with floating electrodes
    • Cheng, M.Y.; Huang, X.H.; Ma, C.W.; Yang, Y.J. A flexible capacitive tactile sensing array with floating electrodes. J. Micromech. Microeng. 2009, 19, 115001.
    • (2009) J. Micromech. Microeng , vol.19 , pp. 115001
    • Cheng, M.Y.1    Huang, X.H.2    Ma, C.W.3    Yang, Y.J.4
  • 7
    • 80053567513 scopus 로고    scopus 로고
    • Impedance-based force transduction within fluid-filled parylene microstructures
    • Gutierrez, C.A.; Meng, E.J. Impedance-based force transduction within fluid-filled parylene microstructures. Microelectromech. Syst. 2011, 20, 1098-1108.
    • (2011) Microelectromech. Syst , vol.20 , pp. 1098-1108
    • Gutierrez, C.A.1    Meng, E.J.2
  • 8
    • 67349210372 scopus 로고    scopus 로고
    • A piezoresistive tactile sensor based on carbon fibers and polymer substrates
    • Park, C.-S.; Park, J.; Lee, D.-W. A piezoresistive tactile sensor based on carbon fibers and polymer substrates. Microelectron. Eng. 2009, 86, 1250-1253.
    • (2009) Microelectron. Eng , vol.86 , pp. 1250-1253
    • Park, C.-S.1    Park, J.2    Lee, D.-W.3
  • 10
    • 78649657809 scopus 로고    scopus 로고
    • Parylene-based electrochemical-MEMS transducers
    • Gutierrez, C.A.; Meng, E. Parylene-based electrochemical-MEMS transducers. J. Microelectromech. Syst. 2010, 19, 1352-1361.
    • (2010) J. Microelectromech. Syst , vol.19 , pp. 1352-1361
    • Gutierrez, C.A.1    Meng, E.2
  • 14
    • 34247636193 scopus 로고    scopus 로고
    • Fabrication of a gas sensor with a piezoelectric PZT film deposited by a novel hydrothermal microwave-assisted annealing
    • Ko, F.H.; Hsu, Y.C.; Wang, M.T.; Huang, G.W.S. Fabrication of a gas sensor with a piezoelectric PZT film deposited by a novel hydrothermal microwave-assisted annealing. Microelectron. Eng. 2007, 84, 1300-1304.
    • (2007) Microelectron. Eng , vol.84 , pp. 1300-1304
    • Ko, F.H.1    Hsu, Y.C.2    Wang, M.T.3    Huang, G.W.S.4
  • 16
    • 0034207890 scopus 로고    scopus 로고
    • Influences of thin Ni layer on the electrical and absorption properties of PZT thin film pyroelectric IR sensors
    • Liu, W.G.; Ko, J.S.; Zhu, W.G. Influences of thin Ni layer on the electrical and absorption properties of PZT thin film pyroelectric IR sensors. Infrared Phys. Technol. 2000, 41, 169-173.
    • (2000) Infrared Phys. Technol , vol.41 , pp. 169-173
    • Liu, W.G.1    Ko, J.S.2    Zhu, W.G.3
  • 17
    • 33847196845 scopus 로고    scopus 로고
    • Energy harvesting MEMS device based on thin film piezoelectric cantilevers
    • Choi, W.J.; Jeon, Y.; Jeong, J.H.; Sood, R.; Kim, S.G. Energy harvesting MEMS device based on thin film piezoelectric cantilevers. J. Electroceram. 2006, 17, 543-548.
    • (2006) J. Electroceram , vol.17 , pp. 543-548
    • Choi, W.J.1    Jeon, Y.2    Jeong, J.H.3    Sood, R.4    Kim, S.G.5
  • 18
    • 22844431664 scopus 로고    scopus 로고
    • MEMS power generator with transverse mode thin film PZT
    • Jeon, Y.B.; Sood, R.; Jeong, J.H.; Kim, S.G. MEMS power generator with transverse mode thin film PZT. Sens. Actuators A Phys. 2005, 122, 16-22.
    • (2005) Sens. Actuators a Phys , vol.122 , pp. 16-22
    • Jeon, Y.B.1    Sood, R.2    Jeong, J.H.3    Kim, S.G.4
  • 19
    • 70349972972 scopus 로고    scopus 로고
    • Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film
    • Lee, B.S.; Lin, S.C.; Wu, W.J.; Wang, X.Y.; Chang, P.Z.; Lee, C.K. Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film. J. Micromech. Microeng. 2009, 19, 065014.
    • (2009) J. Micromech. Microeng , vol.19 , pp. 065014
    • Lee, B.S.1    Lin, S.C.2    Wu, W.J.3    Wang, X.Y.4    Chang, P.Z.5    Lee, C.K.6
  • 21
    • 33847054386 scopus 로고    scopus 로고
    • Preparation of oriented aluminum nitride thin films on polyimide films and piezoelectric response with high thermal stability and flexibility
    • Akiyama, M.; Morofuji, Y.; Kamohara, T.; Nishikubo, K.; Ooishi, Y.; Tsubai, M.; Fukuda, O.; Ueno, N. Preparation of oriented aluminum nitride thin films on polyimide films and piezoelectric response with high thermal stability and flexibility. Adv. Funct. Mater. 2007, 17, 458-462.
    • (2007) Adv. Funct. Mater , vol.17 , pp. 458-462
    • Akiyama, M.1    Morofuji, Y.2    Kamohara, T.3    Nishikubo, K.4    Ooishi, Y.5    Tsubai, M.6    Fukuda, O.7    Ueno, N.8
  • 22
    • 0037464205 scopus 로고    scopus 로고
    • Flexible pulse-wave sensors from oriented aluminum nitride nanocolumns
    • Akiyama, M.; Ueno, N.; Nonaka, K.; Tateyama, H. Flexible pulse-wave sensors from oriented aluminum nitride nanocolumns. Appl. Phys. Lett. 2003, 82, 1977.
    • (2003) Appl. Phys. Lett , vol.82 , pp. 1977
    • Akiyama, M.1    Ueno, N.2    Nonaka, K.3    Tateyama, H.4
  • 23
    • 77951111441 scopus 로고    scopus 로고
    • A piezo-film-based measurement system for global haemodynamic assessment
    • Clemente, F.; Arpaia, P.; Cimmino, P. A piezo-film-based measurement system for global haemodynamic assessment. Physiol. Meas. 2010, 31, 697-714.
    • (2010) Physiol. Meas , vol.31 , pp. 697-714
    • Clemente, F.1    Arpaia, P.2    Cimmino, P.3
  • 24
    • 77957230831 scopus 로고    scopus 로고
    • A piezoelectric plethysmograph sensor based on a Pt wire implanted lead lanthanum zirconate titanate bulk ceramic
    • Gonzalez-Moran, C.O.; Flores-Cuautle, J.J.A.; Suaste-Gomez, E. A piezoelectric plethysmograph sensor based on a Pt wire implanted lead lanthanum zirconate titanate bulk ceramic. Sensors 2010, 10, 7146-7156.
    • (2010) Sensors , vol.10 , pp. 7146-7156
    • Gonzalez-Moran, C.O.1    Flores-Cuautle, J.J.A.2    Suaste-Gomez, E.3
  • 26
    • 67349230242 scopus 로고    scopus 로고
    • Pilot investigation of photoplethysmographic signals and blood oxygen saturation values during blood pressure cuff-induced hypoperfusion
    • Kyriacou, P.A.; Shafqat, K.; Pal, S.K. Pilot investigation of photoplethysmographic signals and blood oxygen saturation values during blood pressure cuff-induced hypoperfusion. Measurement 2009, 42, 1001-1005.
    • (2009) Measurement , vol.42 , pp. 1001-1005
    • Kyriacou, P.A.1    Shafqat, K.2    Pal, S.K.3
  • 27
    • 16644368852 scopus 로고    scopus 로고
    • Optical noninvasive monitoring of skin blood pulsations
    • Spigulis, J. Optical noninvasive monitoring of skin blood pulsations. Appl. Opt. 2005, 44, 1850-1857.
    • (2005) Appl. Opt , vol.44 , pp. 1850-1857
    • Spigulis, J.1
  • 28
    • 7044223006 scopus 로고    scopus 로고
    • The effect of contacting force on photoplethysmographic signals
    • Teng, X.F.; Zhang, Y.T. The effect of contacting force on photoplethysmographic signals. Physiol. Meas. 2004, 25, 1323-1335.
    • (2004) Physiol. Meas , vol.25 , pp. 1323-1335
    • Teng, X.F.1    Zhang, Y.T.2
  • 29
    • 84857577940 scopus 로고    scopus 로고
    • Evaluation of electrical and optical plethysmography sensors for noninvasive monitoring of hemoglobin concentration
    • Phillips, J.P.; Hickey, M.; Kyriacou, P.A. Evaluation of electrical and optical plethysmography sensors for noninvasive monitoring of hemoglobin concentration. Sensors 2012, 12, 1816-1826.
    • (2012) Sensors , vol.12 , pp. 1816-1826
    • Phillips, J.P.1    Hickey, M.2    Kyriacou, P.A.3
  • 30
    • 63649117035 scopus 로고    scopus 로고
    • Pulse transit times to the capillary bed evaluated by laser doppler flowmetry
    • Bernjak, A.; Stefanovska, A. Pulse transit times to the capillary bed evaluated by laser doppler flowmetry. Physiol. Meas. 2009, 30, 245-260.
    • (2009) Physiol. Meas , vol.30 , pp. 245-260
    • Bernjak, A.1    Stefanovska, A.2
  • 31
    • 0032180882 scopus 로고    scopus 로고
    • Qualitative impedance-based health monitoring of civil infrastructures
    • Ayres, J.W.; Lalande, F.; Chaudhry, Z.; Rogers, C.A. Qualitative impedance-based health monitoring of civil infrastructures. Smart Mater. Struct. 1998, 7, 599-605.
    • (1998) Smart Mater. Struct , vol.7 , pp. 599-605
    • Ayres, J.W.1    Lalande, F.2    Chaudhry, Z.3    Rogers, C.A.4
  • 32
    • 76349100980 scopus 로고    scopus 로고
    • Application of electromechanical impedance technique for engineering structures: Review and future issues
    • Annamdas, V.G.M.; Soh, C.K. Application of electromechanical impedance technique for engineering structures: Review and future issues. J. Intell. Mater. Syst. Struct. 2010, 21, 41-59.
    • (2010) J. Intell. Mater. Syst. Struct , vol.21 , pp. 41-59
    • Annamdas, V.G.M.1    Soh, C.K.2
  • 33
    • 76749084845 scopus 로고    scopus 로고
    • Piezoelectric ribbons printed onto rubber for flexible energy conversion
    • Qi, Y.; Jafferis, N.T.; Lyons, K.; Lee, C.M.; Ahmad, H.; McAlpine, M.C. Piezoelectric ribbons printed onto rubber for flexible energy conversion. Nano Lett. 2010, 10, 524-528.
    • (2010) Nano Lett , vol.10 , pp. 524-528
    • Qi, Y.1    Jafferis, N.T.2    Lyons, K.3    Lee, C.M.4    Ahmad, H.5    McAlpine, M.C.6
  • 34
    • 67349288051 scopus 로고    scopus 로고
    • A large area flexible array sensors using screen printing technology
    • Chang, W.Y.; Fang, T.H.; Lin, H.J.; Shen, Y.T.; Lin, Y.C. A large area flexible array sensors using screen printing technology. J. Disp. Technol. 2009, 5, 178-183.
    • (2009) J. Disp. Technol , vol.5 , pp. 178-183
    • Chang, W.Y.1    Fang, T.H.2    Lin, H.J.3    Shen, Y.T.4    Lin, Y.C.5
  • 38
    • 4344685317 scopus 로고    scopus 로고
    • Sol-gel derived mesoporous silica films used as low dielectric constant materials
    • Yu, S.; Wong, T.K.S.; Hu, X.; Pita, K. Sol-gel derived mesoporous silica films used as low dielectric constant materials. Thin Solid Films 2004, 462-463, 311-315.
    • (2004) Thin Solid Films , vol.462-463 , pp. 311-315
    • Yu, S.1    Wong, T.K.S.2    Hu, X.3    Pita, K.4
  • 39
    • 73649141715 scopus 로고    scopus 로고
    • Resistive switching characteristics of ZnO thin film grown on stainless steel for flexible nonvolatile memory devices
    • Lee, S.; Kim, H.; Yun, D.J.; Rhee, S.W.; Yong, K. Resistive switching characteristics of ZnO thin film grown on stainless steel for flexible nonvolatile memory devices. Appl. Phys. Lett. 2009, 95, 262113.
    • Appl. Phys. Lett , vol.95 , Issue.26 , pp. 2009
    • Lee, S.1    Kim, H.2    Yun, D.J.3    Rhee, S.W.4    Yong, K.5
  • 40
    • 67649216565 scopus 로고    scopus 로고
    • Fabrication of the flexible pentacene thin-film transistors on 304 and 430 stainless steel (SS) substrate
    • Yun, D.-J.; Lim, S.-H.; Lee, T.-W.; Rhee, S.-W. Fabrication of the flexible pentacene thin-film transistors on 304 and 430 stainless steel (SS) substrate. Org. Electron. 2009, 10, 970-977.
    • (2009) Org. Electron , vol.10 , pp. 970-977
    • Yun, D.-J.1    Lim, S.-H.2    Lee, T.-W.3    Rhee, S.-W.4
  • 41
    • 29144437769 scopus 로고    scopus 로고
    • Characterization of Pb(Zr,Ti)O-3 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications
    • Suzuki, T.; Kanno, I.; Loverich, J.J.; Kotera, H.; Wasa, K. Characterization of Pb(Zr,Ti)O-3 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications. Sens. Actuators A Phys. 2006, 125, 382-386.
    • (2006) Sens. Actuators a Phys , vol.125 , pp. 382-386
    • Suzuki, T.1    Kanno, I.2    Loverich, J.J.3    Kotera, H.4    Wasa, K.5
  • 42
    • 4544334514 scopus 로고    scopus 로고
    • An analytical model of constrained piezoelectric thin film sensors
    • Ali, R.; Mahapatra, D.R.; Gopalakrishnan, S. An analytical model of constrained piezoelectric thin film sensors. Sens. Actuators A Phys. 2004, 116, 424-437.
    • (2004) Sens. Actuators a Phys , vol.116 , pp. 424-437
    • Ali, R.1    Mahapatra, D.R.2    Gopalakrishnan, S.3
  • 43
    • 48249090072 scopus 로고    scopus 로고
    • Monitoring of impacted aramid-reinforced composites by embedded PVDF acoustic emission sensors
    • Caneva, C.; De Rosa, I.M.; Sarasini, F. Monitoring of impacted aramid-reinforced composites by embedded PVDF acoustic emission sensors. Strain 2008, 44, 308-316.
    • (2008) Strain , vol.44 , pp. 308-316
    • Caneva, C.1    de Rosa, I.M.2    Sarasini, F.3
  • 44
    • 34047152992 scopus 로고    scopus 로고
    • PZT thin films for low voltage actuation: Fabrication and characterization of the transverse piezoelectric coefficient
    • Deshpande, M.; Saggere, L. PZT thin films for low voltage actuation: Fabrication and characterization of the transverse piezoelectric coefficient Sens. Actuators A Phys. 2007, 135, 690-699.
    • (2007) Sens. Actuators a Phys , vol.135 , pp. 690-699
    • Deshpande, M.1    Saggere, L.2
  • 46
    • 79959755659 scopus 로고    scopus 로고
    • Piezoelectric probe for pressure waveform estimation in flexible tubes and its application to the cardiovascular system
    • Almeida, V.G.; Pereira, H.C.; Pereira, T.; Figueiras, E.; Borges, E.; Cardoso, J.M.R.; Correia, C. Piezoelectric probe for pressure waveform estimation in flexible tubes and its application to the cardiovascular system. Sens. Actuators A Phys. 2011, 169, 217-226.
    • (2011) Sens. Actuators a Phys , vol.169 , pp. 217-226
    • Almeida, V.G.1    Pereira, H.C.2    Pereira, T.3    Figueiras, E.4    Borges, E.5    Cardoso, J.M.R.6    Correia, C.7
  • 47
    • 70349335373 scopus 로고    scopus 로고
    • Pulse wave velocity and digital volume pulse as indirect estimators of blood pressure: Pilot study on healthy volunteers
    • Padilla, J.M.; Berjano, E.J.; Saiz, J.; Rodriguez, R.; Facila, L. Pulse wave velocity and digital volume pulse as indirect estimators of blood pressure: Pilot study on healthy volunteers. Cardiovasc. Eng. 2009, 9, 104-112.
    • (2009) Cardiovasc. Eng , vol.9 , pp. 104-112
    • Padilla, J.M.1    Berjano, E.J.2    Saiz, J.3    Rodriguez, R.4    Facila, L.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.