Energy harvesting MEMS device based on thin film piezoelectric cantilevers

Journal of Electroceramics

Volumn 17, Issue 2-4, 2006, Pages 543-548

  Choi, W J ^a   Jeon, Y ^b   Jeong, J H ^c   Sood, R ^d   Kim, S G ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Varian Corp   (South Korea)

^c Korea Institute of Science and Technology   (South Korea)

^d Polychromix   (United States)

Author keywords

Autonomous sensors; Energy harvesting; MEMS; PZT

Indexed keywords

DAMPING; LEAD COMPOUNDS; PIEZOELECTRIC DEVICES; POWER GENERATION; SENSORS; THIN FILMS;

AUTONOMOUS SENSORS; ENERGY HARVESTING; PIEZOELECTRIC CANTILEVERS; VIBRATIONAL ENERGY;

MICROELECTROMECHANICAL DEVICES;

EID: 33847196845     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-006-6287-3     Document Type: Conference Paper

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