Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Lee, B S ^a   Lin, S C ^b   Wu, W J ^a   Wang, X Y ^b   Chang, P Z ^b   Lee, C K ^a,b,c  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOL DEPOSITION; AEROSOL DEPOSITION METHOD; AMBIENT VIBRATIONS; ELECTRICAL ENERGY; ELECTRICAL POWER; G ACCELERATION; HIGH QUALITY; MAXIMUM OUTPUT POWER; MECHANICAL ENERGIES; OPEN-CIRCUIT OUTPUT VOLTAGES; OUTPUT CHARACTERISTICS; OUTPUT VOLTAGES; PIEZOELECTRIC MEMS; PZT DEPOSITION; PZT LAYER; PZT THIN FILM; RESONANT FREQUENCIES; SILICON PROCESS;

ACCELERATION; ATMOSPHERIC AEROSOLS; DEPOSITION; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; RESPIRATORY MECHANICS; SEMICONDUCTING LEAD COMPOUNDS; THIN FILM DEVICES; THIN FILMS; VIBRATIONS (MECHANICAL);

ELECTRIC GENERATORS;

EID: 70349972972     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/065014     Document Type: Article

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