Parylene-based electrochemical-MEMS transducers

Journal of Microelectromechanical Systems

Volumn 19, Issue 6, 2010, Pages 1352-1361

  Gutierrez, Christian A ^a   Meng, Ellis ^a  

^a University of Southern California   (United States)

Author keywords

Biomimetic; contact sensor; EC sensing; EC transduction; electrochemical microelectromechanical systems (EC MEMS); electrolysis actuation; force sensor; impedance based sensor; liquid encapsulation; liquid impedance; mechanotransduction; Parylene C

Indexed keywords

EC SENSING; EC TRANSDUCTION; FORCE SENSOR; IMPEDANCE-BASED SENSOR; MECHANOTRANSDUCTION; MICRO ELECTRO MECHANICAL SYSTEM; PARYLENE C;

BACTERIOPHAGES; BIOMIMETICS; CONTACT SENSORS; ELECTROCHEMISTRY; ELECTROLYSIS; LIQUIDS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; TRANSDUCERS;

COMPOSITE MICROMECHANICS;

EID: 78649657809     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2076791     Document Type: Article

References (40)

1. M. A. Schwarz and P. C. Hauser, "Recent developments in detection methods for microfabricated analytical devices," Lab Chip, vol. 1, no. 1, pp. 1-6, Sep. 2001.
2. D. J. Beebe, G. A. Mensing, and G. M. Walker, "Physics and applications of microfluidics in biology," Annu. Rev. Biomed. Eng., vol. 4, no. 1, pp. 261-286, 2002.
3. R. P. Baldwin, T. J. Roussel, M. M. Crain, V. Bathlagunda, D. J. Jackson, J. Gullapalli, J. A. Conklin, R. Pai, J. F. Naber, K. M. Walsh, and R. S. Keynton, "Fully integrated on-chip electrochemical detection for capillary electrophoresis in a microfabricated device," Anal. Chem., vol. 74, no. 15, pp. 3690-3697, Aug. 2002.
4. W. R. Vandaveer, IV, S. A. Pasas-Farmer, D. J. Fischer, C. N. Frankenfeld, and S. M. Lunte, "Recent developments in electrochemical detection for microchip capillary electrophoresis," Electrophoresis, vol. 25, no. 21/22, pp. 3528-3549, Nov. 2004.
5. D. Erickson and D. Li, "Integrated microfluidic devices," Anal. Chim. Acta, vol. 507, no. 1, pp. 11-26, Apr. 2004.
6. S. Z. Hua, F. Sachs, D. X. Yang, and H. D. Chopra, "Microfluidic actuation using electrochemically generated bubbles," Anal. Chem., vol. 74, no. 24, pp. 6392-6396, Dec. 2002.
7. A. P. Papavasiliou, D. Liepmann, and A. P. Pisano, "Electrolysis- bubble actuated gate valve," in Proc. Solid-State Sensor Actuator Workshop, Hilton Head, SC, 2000, pp. 48-51.
8. W. H. Coulter, "Means for counting particles suspended in a fluid," U.S. Patent 2 656 508, Oct. 20, 1953.
9. N. Wettels, V. J. Santos, R. S. Johansson, and G. E. Loeb, "Biomimetic tactile sensor array," Adv. Robot., vol. 22, no. 8, pp. 829-849, 2008.
10. A. R. Russel, "A tactile sensory skin for measuring surface contours," in Proc. IEEE Region 10 Int. Conf.-Technology Enabling Tomorrow: Computers, Communications and Automation Towards the 21st Century, Melbourne, Australia, 1992, pp. 262-266.
11. A. R. Russel and S. Parkinson, "Sensing surface shape by touch," in Proc. IEEE Int. Conf. Robot. Autom., Atlanta, GA, 1993, pp. 423-428.
12. D. A. Ateya, A. A. Shah, and S. Z. Hua, "Impedance-based response of an electrolytic gas bubble to pressure in microfluidic channels," Sens. Actuators A, Phys., vol. 122, no. 2, pp. 235-241, Aug. 2005.
13. J. D. Weiland, W. Liu, and M. S. Humayun, "Retinal prosthesis," Annu. Rev. Biomed. Eng., vol. 7, pp. 361-401, 2005.
14. D. C. Rodger, A. J. Fong, W. Li, H. Ameri, A. K. Ahuja, C. Gutierrez, I. Lavrov, H. Zhong, P. R. Menon, E. Meng, J. W. Burdick, R. R. Roy, V. R. Edgerton, J. D. Weiland, M. S. Humayun, and Y.-C. Tai, "Flexible parylene-based multielectrode array technology for high-density neural stimulation and recording," Sens. Actuators B, Chem., vol. 132, no. 2, pp. 449-460, Jun. 2008.
15. L. Colodetti, J. D. Weiland, S. Colodetti, A. Ray, M. J. Seiler, D. R. Hinton, and M. S. Humayun, "Pathology of damaging electrical stimulation in the retina," Exp. Eye Res., vol. 85, no. 1, pp. 23-33, Jul. 2007.
16. D. Reigada, W. Lu, M. Zhang, and C. H. Mitchell, "Elevated pressure triggers a physiological release of ATP from the retina: Possible role for pannexin hemichannels," Neuroscience, vol. 157, no. 2, pp. 396-404, Nov. 2008.
17. A. B. Majji, M. S. Humayun, J. D. Weiland, S. Suzuki, S. A. D'Anna, and E. de Juan, Jr., "Long-term histological and electrophysiologi-cal results of an inactive epiretinal electrode array implantation in dogs," Invest. Ophthalmol. Vis. Sci., vol. 40, no. 9, pp. 2073-2081, 1999.
18. B. C. Basinger, A. P. Rowley, K. Chen, M. S. Humayun, and J. D. Weiland, "Finite element modeling of retinal prosthesis mechanics," J. Neural Eng., vol. 6, no. 5, p. 055 006, Oct. 2009.
19. Y.-B. Lu, K. Franze, G. Seifert, C. Steinha, F. Kirchhoff, H. Wolburg, J. Guck, P. Janmey, E.-Q. Wei, J. Kas, and A. Reichenbach, "Viscoelas-tic properties of individual glial cells and neurons in the CNS," PNAS, vol. 103, no. 47, pp. 17 759-17 764, Nov. 2006.
20. H. A. Quigley, "Neuronal death in glaucoma," Prog. Retin. Eye Res., vol. 18, no. 1, pp. 39-57, Jan. 1999.
21. 2-terminal kinase activation," Hypertension, vol. 49, no. 2, pp. 347-354, Feb. 2007.
22. C. A. Gutierrez and E. Meng, "A dual function parylene-based bio-mimetic tactile sensor and actuator for next generation mechanically responsive microelectrode arrays," in Proc. Transducers, Denver, CO, 2009, pp. 2194-2197.
23. H. Zhang, S. Wang, and Y. Xu, "Study and applications of a parylene self-sealing structure," in Proc. MEMS, 2006, pp. 282-285.
24. L. S. Robblee and T. L. Rose, "The electrochemistry of electrical stimulation," in Proc. Annu. Int. Conf. IEEE Eng. Med. Biol. Soc., Philadelphia, PA, 1990, pp. 1479-1480.
25. J. E. B. Randles, "Kinetics of rapid electrode reactions," in Proc. Discuss. Faraday Soc., 1947, pp. 11-19.
26. L. S. Robblee and T. L. Rose, "Electrochemical guidelines for selection of protocols and electrode materials for neural stimulation," in Neural Prostheses Fundamental Studies, W. F. Agnew and D. B. Mcreery, Eds. Englewood Cliffs, NJ: Prentice-Hall, 1990, pp. 26-59.
27. L. Wolgemuth, "Assessing the performance and suitability of pary-lene coating," Med. Device Diagn. Ind., vol. 22, no. 8, pp. 42-49, 2000.
28. Cookson Specialty Coating Systems. [Online]. Available: http://www. scscoatings.com/parylene-knowledge/specifications
29. C. A. Gutierrez and E. Meng, "Improved self-sealing liquid encapsulation in parylene structures by integrated stackable annular-plate stiction valve," in Proc. IEEE MEMS, Hong Kong, 2010, pp. 524-527.
30. C. H. Mastrangelo and C. H. Hsu, "Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory," J. Microelectro-mech. Syst., vol. 2, no. 1, pp. 33-43, Mar. 1993.
31. C. H. Mastrangelo and C. H. Hsu, "Mechanical stability and adhesion of microstructures under capillary forces. II. Experiments," J. Microelectro-mech. Syst., vol. 2, no. 1, pp. 44-55, Mar. 1993.
32. Z. Wang and Y. Xu, "Theoretical and experimental study of annular-plate self-sealing structures," J. Microelectromech. Syst., vol. 17, no. 1, pp. 185-192, Feb. 2008.
33. S. Matsumoto and N. Ichikawa, "New methods for liquid encapsulation in polymer MEMS structures," in Proc. MEMS, Tucson, AZ, 2008, pp. 415-418.
34. A. Tanioka, N. Fukushima, K. Hasegawa, K. Miyasaka, and N. Takahashi, "Permeation of gases across the poly(chloro-p-xylylene) membrane," J. Appl. Polym. Sci., vol. 54, no. 2, pp. 219-229, Oct. 1994.
35. P. R. Menon, W. Li, A. Tooker, and Y. C. Tai, "Characterization of water vapor permeation through thin film parylene C," in Proc. Transducers, Denver, CO, 2009, pp. 1892-1895.
36. M. D. Giovanni, Flat and Corrugated Diaphragm Design Handbook, vol. 11. New York: Marcel Dekker, 1982.
37. K. Kasten, N. Kordas, H. Kappert, and W. Mokwa, "Capacitive pressure sensor with monolithically integrated CMOS readout circuit for high temperature applications," Sens. Actuators A, Phys., vol. 97/98, pp. 83-87, Apr. 2002.
38. P. Hille, R. Höhler, and H. Strack, "A linearisation and compensation method for integrated sensors," Sens. Actuators A, Phys., vol. 44, no. 2, pp. 95-102, Aug. 1994.
39. M. Helsel, J. N. Zemel, and V. Dominko, "An impedance tomo-graphic tactile sensor," Sens. Actuators, vol. 14, no. 1, pp. 93-98, 1988.
40. R. Huang and Y. C. Tai, "Parylene to silicon adhesion enhancement," in Proc. Transducers, Denver, CO, 2009, pp. 1027-1030.