A sweeping mode integrated fingerprint sensor with 256 tactile microbeams

Journal of Microelectromechanical Systems

Volumn 13, Issue 4, 2004, Pages 636-644

  Charlot, Benoît ^a   Parrain, Fabien ^b   Galy, Nicolas ^a   Basrour, Skandar ^a   Courtois, Bernard ^a  

^a TIMA LABORATORY   (France)

^b UNIV PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PATTERN RECOGNITION SYSTEMS; SCANNING;

COMPATIBLE BULK MICROMACHINING TECHNOLOGIES; INTEGRATED FINGERPRINT SENSOR; INTEGRATED MEMS; SWITCH CAPACITOR SYSTEMS; TACTILE MICROBEAMS;

MICROSENSORS;

EID: 4344591742     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.832195     Document Type: Article

References (19)

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