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Volumn 276, Issue , 2013, Pages 347-358

New model for low-temperature oxidation of copper single crystal

Author keywords

Copper; Ellipsometry; Grain growth; Low temperature oxidation

Indexed keywords

ACTIVATION ENERGY; COPPER; COPPER OXIDES; ELLIPSOMETRY; GRAIN BOUNDARIES; GROWTH KINETICS; METAL IONS; METALS; OXIDATION; SINGLE CRYSTALS; TEMPERATURE;

EID: 84877578336     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.03.096     Document Type: Article
Times cited : (60)

References (72)
  • 2
    • 33747557398 scopus 로고    scopus 로고
    • High-performance interconnects. An integration overview
    • R.H. Havemann, and J.A. Hutchby High-performance interconnects. An integration overview Proceedings of the IEEE 89 2001 586 601
    • (2001) Proceedings of the IEEE , vol.89 , pp. 586-601
    • Havemann, R.H.1    Hutchby, J.A.2
  • 3
    • 84869990893 scopus 로고    scopus 로고
    • Time dependent dielectric breakdown in copper low-k interconnects: Mechanisms and reliability models
    • T.K.S. Wong Time dependent dielectric breakdown in copper low-k interconnects: mechanisms and reliability models Materials 5 2005 1602 1625
    • (2005) Materials , vol.5 , pp. 1602-1625
    • Wong, T.K.S.1
  • 4
    • 0037767854 scopus 로고    scopus 로고
    • Field-induced cation migration in Cu oxide films by in situ scanning tunnelling microscopy
    • J.P. Singh, T.M. Lu, and G.C. Wang Field-induced cation migration in Cu oxide films by in situ scanning tunnelling microscopy Applied Physics Letters 82 2003 4672 4674
    • (2003) Applied Physics Letters , vol.82 , pp. 4672-4674
    • Singh, J.P.1    Lu, T.M.2    Wang, G.C.3
  • 5
    • 78650736717 scopus 로고    scopus 로고
    • Cu penetration into low-k dielectric during deposition and bias-temperature stress
    • M. He, S. Novak, L. Vanamurthy, H. Bakhru, and J. Plawsky Cu penetration into low-k dielectric during deposition and bias-temperature stress Applied Physics Letters 97 2010 252901
    • (2010) Applied Physics Letters , vol.97 , pp. 252901
    • He, M.1    Novak, S.2    Vanamurthy, L.3    Bakhru, H.4    Plawsky, J.5
  • 6
    • 79959871748 scopus 로고    scopus 로고
    • Bias-temperature stress of Al on porous low-k dielectrics
    • M. He, H. Li, P.I. Wang, and T.M. Lu Bias-temperature stress of Al on porous low-k dielectrics Microelectronics Reliability 51 2011 1342 1345
    • (2011) Microelectronics Reliability , vol.51 , pp. 1342-1345
    • He, M.1    Li, H.2    Wang, P.I.3    Lu, T.M.4
  • 7
    • 33751229932 scopus 로고    scopus 로고
    • Optical and structural properties of copper oxide thin films grown by oxidation of metal layers
    • G. Papadimitropoulos, N. Vourdas, V. Em Vamvakas, and D. Davazoglou Optical and structural properties of copper oxide thin films grown by oxidation of metal layers Thin Solid Films 515 2006 2428 2432
    • (2006) Thin Solid Films , vol.515 , pp. 2428-2432
    • Papadimitropoulos, G.1    Vourdas, N.2    Em Vamvakas, V.3    Davazoglou, D.4
  • 9
    • 55949111362 scopus 로고    scopus 로고
    • Electrochemically deposited p-n homojunction curous oxide solar cells
    • K. Han, and M. Tao Electrochemically deposited p-n homojunction curous oxide solar cells Solar Energy Materials and Solar Cells 93 2009 153 157
    • (2009) Solar Energy Materials and Solar Cells , vol.93 , pp. 153-157
    • Han, K.1    Tao, M.2
  • 15
    • 0012909775 scopus 로고
    • Über den mechanismus der oxydation von nickel bei niedrigen temperaturen
    • K. Hauffe, and B.I. Ilschner Über den mechanismus der oxydation von nickel bei niedrigen temperaturen Zeitschrift fur Elektrochemie 58 1954 382 387
    • (1954) Zeitschrift fur Elektrochemie , vol.58 , pp. 382-387
    • Hauffe, K.1    Ilschner, B.I.2
  • 16
    • 0000334352 scopus 로고
    • On the logarithmic rate law in chemisorption and oxidation
    • P.T. Landsberg On the logarithmic rate law in chemisorption and oxidation Journal of Chemical Physics 23 1955 1079 1087
    • (1955) Journal of Chemical Physics , vol.23 , pp. 1079-1087
    • Landsberg, P.T.1
  • 19
    • 0000563290 scopus 로고
    • Initial oxidation of metals and the logarithmic equation
    • H.H. Uhlig Initial oxidation of metals and the logarithmic equation Acta Metallurgica 4 1956 541 554
    • (1956) Acta Metallurgica , vol.4 , pp. 541-554
    • Uhlig, H.H.1
  • 20
    • 0012853004 scopus 로고
    • The mechanism of oxidation and tarnishing
    • U.R. Evans The mechanism of oxidation and tarnishing Journal of Electrochemical Society 91 1947 547 572
    • (1947) Journal of Electrochemical Society , vol.91 , pp. 547-572
    • Evans, U.R.1
  • 22
    • 33644775604 scopus 로고    scopus 로고
    • The oxidation kinetics of nickel thin films studied by spectroscopic ellipsometry
    • A.M. Lopez-Beltran, and A. Mendoza-Galvan The oxidation kinetics of nickel thin films studied by spectroscopic ellipsometry Thin Solid Films 503 2006 40
    • (2006) Thin Solid Films , vol.503 , pp. 40
    • Lopez-Beltran, A.M.1    Mendoza-Galvan, A.2
  • 23
    • 0345290246 scopus 로고
    • On the mechanism of low-temperature oxidation (23 -450 C) of polycrystalline nickel
    • M.J. Graham, and M. Cohen On the mechanism of low-temperature oxidation (23 -450 C) of polycrystalline nickel Journal of the Electrochemical Society 119 1972 879 882
    • (1972) Journal of the Electrochemical Society , vol.119 , pp. 879-882
    • Graham, M.J.1    Cohen, M.2
  • 24
    • 0001249843 scopus 로고
    • The rates of oxidation of several faces of a single crystal of copper as determined with elliptically polarized light
    • F.W. Young Jr., J.V. Cathcart, and A.T. Gwathmey The rates of oxidation of several faces of a single crystal of copper as determined with elliptically polarized light Acta Metallurgica 4 1956 145 152
    • (1956) Acta Metallurgica , vol.4 , pp. 145-152
    • Young Jr., F.W.1    Cathcart, J.V.2    Gwathmey, A.T.3
  • 25
    • 0036640726 scopus 로고    scopus 로고
    • Reflectometry studies of the oxidation kinetics of thin copper films
    • A. Njeh, T. Wieder, and H. Fuess Reflectometry studies of the oxidation kinetics of thin copper films Surface and Interface Analysis 33 2002 626 628
    • (2002) Surface and Interface Analysis , vol.33 , pp. 626-628
    • Njeh, A.1    Wieder, T.2    Fuess, H.3
  • 26
    • 0027594288 scopus 로고
    • The oxidation kinetics of thin copper films studied by ellipsometry
    • M. Raugh, and P. Wibmann The oxidation kinetics of thin copper films studied by ellipsometry Thin Solid Films 228 1993 121 124
    • (1993) Thin Solid Films , vol.228 , pp. 121-124
    • Raugh, M.1    Wibmann, P.2
  • 27
    • 0014927176 scopus 로고
    • Formation of very thin oxide films on copper: Kinetics and mechanism
    • P.K. Krishnamoorthy, and S.C. Sircar Formation of very thin oxide films on copper: kinetics and mechanism Oxidation of Metals 2 1970 349 359
    • (1970) Oxidation of Metals , vol.2 , pp. 349-359
    • Krishnamoorthy, P.K.1    Sircar, S.C.2
  • 28
    • 0036722434 scopus 로고    scopus 로고
    • Optical characterization of thin thermal oxide films on copper by ellipsometry
    • H. Derin, and K. Kantarli Optical characterization of thin thermal oxide films on copper by ellipsometry Applied Physics A: Materials Science and Processing 75 2002 391 395
    • (2002) Applied Physics A: Materials Science and Processing , vol.75 , pp. 391-395
    • Derin, H.1    Kantarli, K.2
  • 30
    • 0034276297 scopus 로고    scopus 로고
    • Kinetic investigation of copper film oxidation by spectroscopic ellipsometry and reflectometry
    • Y.Z. Hu, R. Sharangpani, and S.P. Tay Kinetic investigation of copper film oxidation by spectroscopic ellipsometry and reflectometry Journal of Vacuum Science and Technology A 18 2000 2527 2532
    • (2000) Journal of Vacuum Science and Technology A , vol.18 , pp. 2527-2532
    • Hu, Y.Z.1    Sharangpani, R.2    Tay, S.P.3
  • 31
    • 0035478037 scopus 로고    scopus 로고
    • Oxidation behaviour of Cu thin films on Si wafer at 175-400 C
    • W. Gao, H. Hong, J. He, A. Thomas, L. Chan, and S. Li Oxidation behaviour of Cu thin films on Si wafer at 175-400 C Materials Letters 51 2001 78 84
    • (2001) Materials Letters , vol.51 , pp. 78-84
    • Gao, W.1    Hong, H.2    He, J.3    Thomas, A.4    Chan, L.5    Li, S.6
  • 32
    • 33947448981 scopus 로고
    • Low temperature oxidation of copper. I. Physical mechanism
    • T.N. Rhodin Jr. Low temperature oxidation of copper. I. Physical mechanism Journal of the American Chemical Society 72 1950 5102 5106
    • (1950) Journal of the American Chemical Society , vol.72 , pp. 5102-5106
    • Rhodin Jr., T.N.1
  • 33
    • 0026754889 scopus 로고
    • Optical ellipsometry and electron spectroscopy studies of copper oxidation related to copper on printed circuit boards
    • A. Manara, V. Sirtori, and L. Mammarella Optical ellipsometry and electron spectroscopy studies of copper oxidation related to copper on printed circuit boards Surface and Interface Analysis 18 1992 32 38
    • (1992) Surface and Interface Analysis , vol.18 , pp. 32-38
    • Manara, A.1    Sirtori, V.2    Mammarella, L.3
  • 34
    • 0019525942 scopus 로고
    • A critical appraisal of the logarithmic rate law in thin-film formation during oxidation of copper and its alloys
    • S.K. Roy, and S.C. Sircar A critical appraisal of the logarithmic rate law in thin-film formation during oxidation of copper and its alloys Oxidation of Metals 15 1981 9 20
    • (1981) Oxidation of Metals , vol.15 , pp. 9-20
    • Roy, S.K.1    Sircar, S.C.2
  • 36
    • 0036762307 scopus 로고    scopus 로고
    • Oxidation mechanism of copper at 623-1073 K
    • Y. Zhu, K. Mimura, and M. Isshiki Oxidation mechanism of copper at 623-1073 K Materials Transactions 43 2002 2173 2176
    • (2002) Materials Transactions , vol.43 , pp. 2173-2176
    • Zhu, Y.1    Mimura, K.2    Isshiki, M.3
  • 37
    • 84877584380 scopus 로고    scopus 로고
    • Doctoral thesis, Tohoku University
    • J. Iijima, Doctoral thesis, Tohoku University, 2005.
    • (2005)
    • Iijima, J.1
  • 38
    • 33845979500 scopus 로고    scopus 로고
    • Formation of hollow ZnO through low-temperature oxidation of Zn nanoparticles
    • R. Nakamura, J.C. Lee, D. Tokozakura, H. Mori, and H. Nakajima Formation of hollow ZnO through low-temperature oxidation of Zn nanoparticles Materials Letters 61 2007 1060 1063
    • (2007) Materials Letters , vol.61 , pp. 1060-1063
    • Nakamura, R.1    Lee, J.C.2    Tokozakura, D.3    Mori, H.4    Nakajima, H.5
  • 42
    • 0038180818 scopus 로고    scopus 로고
    • Film thickness studies for the chemically synthesized conducting polyaniline
    • M.M. Ayad, and M.A. Shenashin Film thickness studies for the chemically synthesized conducting polyaniline European Polymer Journal 39 2003 1319 1324
    • (2003) European Polymer Journal , vol.39 , pp. 1319-1324
    • Ayad, M.M.1    Shenashin, M.A.2
  • 43
    • 43949163694 scopus 로고
    • Ellipsometric studies on the oxidation of thin copper films
    • M. Rauh, P. Wibmann, and M. Wolfel Ellipsometric studies on the oxidation of thin copper films Thin Solid Films 233 1993 289 292
    • (1993) Thin Solid Films , vol.233 , pp. 289-292
    • Rauh, M.1    Wibmann, P.2    Wolfel, M.3
  • 45
    • 84955024817 scopus 로고
    • Thickness of natural oxide films determined by AES and XPS with/without sputtering
    • H.J. Mathieu, M. Datta, and D. Landolt Thickness of natural oxide films determined by AES and XPS with/without sputtering Journal of Vacuum Science and Technology A 3 1995 331 335
    • (1995) Journal of Vacuum Science and Technology A , vol.3 , pp. 331-335
    • Mathieu, H.J.1    Datta, M.2    Landolt, D.3
  • 46
    • 77955708488 scopus 로고    scopus 로고
    • Depth profiling and angular dependent XPS analysis of ultra thin oxide film on duplex stainless steel
    • C. Donik, D. Mandrino, and M. Jenko Depth profiling and angular dependent XPS analysis of ultra thin oxide film on duplex stainless steel Vacuum 84 2010 1266 1269
    • (2010) Vacuum , vol.84 , pp. 1266-1269
    • Donik, C.1    Mandrino, D.2    Jenko, M.3
  • 49
    • 9144226893 scopus 로고    scopus 로고
    • Oxidation kinetics of epitaxial (1 0 0) copper films at 25 C and 50 C
    • A.T. Fromhold Jr., and M.H. Anderson Jr. Oxidation kinetics of epitaxial (1 0 0) copper films at 25 C and 50 C Oxidation of Metals 62 2004 237 272
    • (2004) Oxidation of Metals , vol.62 , pp. 237-272
    • Fromhold Jr., A.T.1    Anderson Jr., M.H.2
  • 50
    • 0001286864 scopus 로고    scopus 로고
    • Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth
    • J. Lee, P.I. Rovira, I. An, and R.W. Collins Rotating-compensator multichannel ellipsometry: applications for real time Stokes vector spectroscopy of thin film growth Review of Scientific Instruments 69 1998 1800 1810
    • (1998) Review of Scientific Instruments , vol.69 , pp. 1800-1810
    • Lee, J.1    Rovira, P.I.2    An, I.3    Collins, R.W.4
  • 52
    • 5244337901 scopus 로고
    • Über die Mitwirkung von phasengrenzreaktionen bei der oxydation von metallen und legierungen bei höheren temperaturen
    • K. Hauffe, and H. Pfeiffer Über die Mitwirkung von phasengrenzreaktionen bei der oxydation von metallen und legierungen bei höheren temperaturen Zeitschrift fur Elektrochemie 56 1956 390 398
    • (1956) Zeitschrift fur Elektrochemie , vol.56 , pp. 390-398
    • Hauffe, K.1    Pfeiffer, H.2
  • 54
    • 0005243342 scopus 로고
    • Initial oxidation rate of nickel and effect of the curie temperature
    • H. Uhlig, J. Pickett, and J. MacNairn Initial oxidation rate of nickel and effect of the curie temperature Acta Metallurgica 7 1959 111 117
    • (1959) Acta Metallurgica , vol.7 , pp. 111-117
    • Uhlig, H.1    Pickett, J.2    Macnairn, J.3
  • 55
    • 0013545382 scopus 로고
    • Structure and growth of thin films on metals exposed to oxygen
    • H.H. Uhlig Structure and growth of thin films on metals exposed to oxygen Corrosion Science 7 1967 325 339
    • (1967) Corrosion Science , vol.7 , pp. 325-339
    • Uhlig, H.H.1
  • 56
    • 0029230095 scopus 로고
    • Space-charge modification of the ionic currents for oxide growth
    • A.T. Fromhold Space-charge modification of the ionic currents for oxide growth Solid State Ionics 75 1995 229 239
    • (1995) Solid State Ionics , vol.75 , pp. 229-239
    • Fromhold, A.T.1
  • 58
    • 0038412482 scopus 로고    scopus 로고
    • Initial oxidation kinetics of copper (1 1 0) film investigated by in situ UHV-TEM
    • G. Zhou, and J.C. Yang Initial oxidation kinetics of copper (1 1 0) film investigated by in situ UHV-TEM Surface Science 531 2003 359 367
    • (2003) Surface Science , vol.531 , pp. 359-367
    • Zhou, G.1    Yang, J.C.2
  • 59
    • 29044451121 scopus 로고    scopus 로고
    • Initial oxidation kinetics of Cu(1 0 0), (1 1 0) and (1 1 1) thin films investigated by in situ ultra-high-vacuum transmission electron microscopy
    • G. Zhou, and J.C. Yang Initial oxidation kinetics of Cu(1 0 0), (1 1 0) and (1 1 1) thin films investigated by in situ ultra-high-vacuum transmission electron microscopy Journal of Materials Research 20 2005 1684 1694
    • (2005) Journal of Materials Research , vol.20 , pp. 1684-1694
    • Zhou, G.1    Yang, J.C.2
  • 60
    • 0015064951 scopus 로고
    • Oxidation of copper at high temperature
    • S. Mrowec, and A. Stoklosa Oxidation of copper at high temperature Oxidation of Metals 3 1971 291 311
    • (1971) Oxidation of Metals , vol.3 , pp. 291-311
    • Mrowec, S.1    Stoklosa, A.2
  • 61
    • 36549042056 scopus 로고    scopus 로고
    • Quantitative prediction of voids formation in a growing nickel oxide scale at 1373 K
    • K. Akiba, M. Ueda, K. Kawamura, and T. Maruyama Quantitative prediction of voids formation in a growing nickel oxide scale at 1373 K Materials Transactions 48 2007 2753 2761
    • (2007) Materials Transactions , vol.48 , pp. 2753-2761
    • Akiba, K.1    Ueda, M.2    Kawamura, K.3    Maruyama, T.4
  • 62
    • 36149014399 scopus 로고
    • Surface mobility of copper ions on cuprous oxide
    • R. Frerichs, and I. Liberman Surface mobility of copper ions on cuprous oxide Physical Review 121 1961 991 996
    • (1961) Physical Review , vol.121 , pp. 991-996
    • Frerichs, R.1    Liberman, I.2
  • 64
    • 0141876566 scopus 로고
    • Diffusion of radioactive copper during oxidation of copper foil
    • G.W. Castellan, and W.J. Moore Diffusion of radioactive copper during oxidation of copper foil Journal of Chemical Physics 17 1949 41 43
    • (1949) Journal of Chemical Physics , vol.17 , pp. 41-43
    • Castellan, G.W.1    Moore, W.J.2
  • 65
    • 0346119965 scopus 로고    scopus 로고
    • Temperature effects on the growth of oxide islands on Cu(1 1 0)
    • G. Zhou, and J.C. Yang Temperature effects on the growth of oxide islands on Cu(1 1 0) Applied Surface Science 222 2004 357 364
    • (2004) Applied Surface Science , vol.222 , pp. 357-364
    • Zhou, G.1    Yang, J.C.2
  • 66
    • 0041342221 scopus 로고
    • Oxygen-diffusion-induced phase boundary migration in copper oxide thin films
    • J. Li, S.Q. Wang, J.W. Mayer, and K.N. Tu Oxygen-diffusion-induced phase boundary migration in copper oxide thin films Physical Review B 39 1989 12367 12370
    • (1989) Physical Review B , vol.39 , pp. 12367-12370
    • Li, J.1    Wang, S.Q.2    Mayer, J.W.3    Tu, K.N.4
  • 67
    • 0013002607 scopus 로고
    • Parabolic rate constants and diffusion mechanisms in oxides and sulfides
    • W.J. Moore Parabolic rate constants and diffusion mechanisms in oxides and sulfides Zeitschrift fur Elektrochemie 63 1959 794 798
    • (1959) Zeitschrift fur Elektrochemie , vol.63 , pp. 794-798
    • Moore, W.J.1
  • 68
    • 0015346158 scopus 로고
    • Short-circuit diffusion in the growth of nickel oxide scales on nickel crystal faces
    • R. Herchl, N.N. Khoi, T. Homma, and W.W. Smeltzer Short-circuit diffusion in the growth of nickel oxide scales on nickel crystal faces Oxidation of Metals 4 1972 35 49
    • (1972) Oxidation of Metals , vol.4 , pp. 35-49
    • Herchl, R.1    Khoi, N.N.2    Homma, T.3    Smeltzer, W.W.4
  • 70
    • 0017246019 scopus 로고
    • Influence on the oxidation kinetics if metals by control of structure of oxide scale
    • S. Matsunaga, and T. Homma Influence on the oxidation kinetics if metals by control of structure of oxide scale Oxidation of Metals 10 1976 361 376
    • (1976) Oxidation of Metals , vol.10 , pp. 361-376
    • Matsunaga, S.1    Homma, T.2
  • 71
    • 36248966220 scopus 로고    scopus 로고
    • Oxidation kinetics of microcrystalline Ni-11.5Cr-4.5Co-0.5Al superalloy sheet fabricated by electron beam physical vapor deposition at 800 C
    • G. Zeng, M. Li, J. Han, X. He, and W. Li Oxidation kinetics of microcrystalline Ni-11.5Cr-4.5Co-0.5Al superalloy sheet fabricated by electron beam physical vapor deposition at 800 C Materials Letters 62 2008 289 292
    • (2008) Materials Letters , vol.62 , pp. 289-292
    • Zeng, G.1    Li, M.2    Han, J.3    He, X.4    Li, W.5


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