-
2
-
-
33747557398
-
High-performance interconnects. An integration overview
-
R.H. Havemann, and J.A. Hutchby High-performance interconnects. An integration overview Proceedings of the IEEE 89 2001 586 601
-
(2001)
Proceedings of the IEEE
, vol.89
, pp. 586-601
-
-
Havemann, R.H.1
Hutchby, J.A.2
-
3
-
-
84869990893
-
Time dependent dielectric breakdown in copper low-k interconnects: Mechanisms and reliability models
-
T.K.S. Wong Time dependent dielectric breakdown in copper low-k interconnects: mechanisms and reliability models Materials 5 2005 1602 1625
-
(2005)
Materials
, vol.5
, pp. 1602-1625
-
-
Wong, T.K.S.1
-
4
-
-
0037767854
-
Field-induced cation migration in Cu oxide films by in situ scanning tunnelling microscopy
-
J.P. Singh, T.M. Lu, and G.C. Wang Field-induced cation migration in Cu oxide films by in situ scanning tunnelling microscopy Applied Physics Letters 82 2003 4672 4674
-
(2003)
Applied Physics Letters
, vol.82
, pp. 4672-4674
-
-
Singh, J.P.1
Lu, T.M.2
Wang, G.C.3
-
5
-
-
78650736717
-
Cu penetration into low-k dielectric during deposition and bias-temperature stress
-
M. He, S. Novak, L. Vanamurthy, H. Bakhru, and J. Plawsky Cu penetration into low-k dielectric during deposition and bias-temperature stress Applied Physics Letters 97 2010 252901
-
(2010)
Applied Physics Letters
, vol.97
, pp. 252901
-
-
He, M.1
Novak, S.2
Vanamurthy, L.3
Bakhru, H.4
Plawsky, J.5
-
6
-
-
79959871748
-
Bias-temperature stress of Al on porous low-k dielectrics
-
M. He, H. Li, P.I. Wang, and T.M. Lu Bias-temperature stress of Al on porous low-k dielectrics Microelectronics Reliability 51 2011 1342 1345
-
(2011)
Microelectronics Reliability
, vol.51
, pp. 1342-1345
-
-
He, M.1
Li, H.2
Wang, P.I.3
Lu, T.M.4
-
7
-
-
33751229932
-
Optical and structural properties of copper oxide thin films grown by oxidation of metal layers
-
G. Papadimitropoulos, N. Vourdas, V. Em Vamvakas, and D. Davazoglou Optical and structural properties of copper oxide thin films grown by oxidation of metal layers Thin Solid Films 515 2006 2428 2432
-
(2006)
Thin Solid Films
, vol.515
, pp. 2428-2432
-
-
Papadimitropoulos, G.1
Vourdas, N.2
Em Vamvakas, V.3
Davazoglou, D.4
-
9
-
-
55949111362
-
Electrochemically deposited p-n homojunction curous oxide solar cells
-
K. Han, and M. Tao Electrochemically deposited p-n homojunction curous oxide solar cells Solar Energy Materials and Solar Cells 93 2009 153 157
-
(2009)
Solar Energy Materials and Solar Cells
, vol.93
, pp. 153-157
-
-
Han, K.1
Tao, M.2
-
15
-
-
0012909775
-
Über den mechanismus der oxydation von nickel bei niedrigen temperaturen
-
K. Hauffe, and B.I. Ilschner Über den mechanismus der oxydation von nickel bei niedrigen temperaturen Zeitschrift fur Elektrochemie 58 1954 382 387
-
(1954)
Zeitschrift fur Elektrochemie
, vol.58
, pp. 382-387
-
-
Hauffe, K.1
Ilschner, B.I.2
-
16
-
-
0000334352
-
On the logarithmic rate law in chemisorption and oxidation
-
P.T. Landsberg On the logarithmic rate law in chemisorption and oxidation Journal of Chemical Physics 23 1955 1079 1087
-
(1955)
Journal of Chemical Physics
, vol.23
, pp. 1079-1087
-
-
Landsberg, P.T.1
-
19
-
-
0000563290
-
Initial oxidation of metals and the logarithmic equation
-
H.H. Uhlig Initial oxidation of metals and the logarithmic equation Acta Metallurgica 4 1956 541 554
-
(1956)
Acta Metallurgica
, vol.4
, pp. 541-554
-
-
Uhlig, H.H.1
-
20
-
-
0012853004
-
The mechanism of oxidation and tarnishing
-
U.R. Evans The mechanism of oxidation and tarnishing Journal of Electrochemical Society 91 1947 547 572
-
(1947)
Journal of Electrochemical Society
, vol.91
, pp. 547-572
-
-
Evans, U.R.1
-
21
-
-
11344251107
-
Surface oxidation kinetics of Cr film by Nd-YAG laser
-
J. Lian, Q. Dong, Z. Guo, Q. Xu, J. Yang, J. Hu, Q. Guan, and B. Chen Surface oxidation kinetics of Cr film by Nd-YAG laser Materials Science and Engineering A 391 2005 210 220
-
(2005)
Materials Science and Engineering
, vol.391 A
, pp. 210-220
-
-
Lian, J.1
Dong, Q.2
Guo, Z.3
Xu, Q.4
Yang, J.5
Hu, J.6
Guan, Q.7
Chen, B.8
-
22
-
-
33644775604
-
The oxidation kinetics of nickel thin films studied by spectroscopic ellipsometry
-
A.M. Lopez-Beltran, and A. Mendoza-Galvan The oxidation kinetics of nickel thin films studied by spectroscopic ellipsometry Thin Solid Films 503 2006 40
-
(2006)
Thin Solid Films
, vol.503
, pp. 40
-
-
Lopez-Beltran, A.M.1
Mendoza-Galvan, A.2
-
23
-
-
0345290246
-
On the mechanism of low-temperature oxidation (23 -450 C) of polycrystalline nickel
-
M.J. Graham, and M. Cohen On the mechanism of low-temperature oxidation (23 -450 C) of polycrystalline nickel Journal of the Electrochemical Society 119 1972 879 882
-
(1972)
Journal of the Electrochemical Society
, vol.119
, pp. 879-882
-
-
Graham, M.J.1
Cohen, M.2
-
24
-
-
0001249843
-
The rates of oxidation of several faces of a single crystal of copper as determined with elliptically polarized light
-
F.W. Young Jr., J.V. Cathcart, and A.T. Gwathmey The rates of oxidation of several faces of a single crystal of copper as determined with elliptically polarized light Acta Metallurgica 4 1956 145 152
-
(1956)
Acta Metallurgica
, vol.4
, pp. 145-152
-
-
Young Jr., F.W.1
Cathcart, J.V.2
Gwathmey, A.T.3
-
25
-
-
0036640726
-
Reflectometry studies of the oxidation kinetics of thin copper films
-
A. Njeh, T. Wieder, and H. Fuess Reflectometry studies of the oxidation kinetics of thin copper films Surface and Interface Analysis 33 2002 626 628
-
(2002)
Surface and Interface Analysis
, vol.33
, pp. 626-628
-
-
Njeh, A.1
Wieder, T.2
Fuess, H.3
-
26
-
-
0027594288
-
The oxidation kinetics of thin copper films studied by ellipsometry
-
M. Raugh, and P. Wibmann The oxidation kinetics of thin copper films studied by ellipsometry Thin Solid Films 228 1993 121 124
-
(1993)
Thin Solid Films
, vol.228
, pp. 121-124
-
-
Raugh, M.1
Wibmann, P.2
-
27
-
-
0014927176
-
Formation of very thin oxide films on copper: Kinetics and mechanism
-
P.K. Krishnamoorthy, and S.C. Sircar Formation of very thin oxide films on copper: kinetics and mechanism Oxidation of Metals 2 1970 349 359
-
(1970)
Oxidation of Metals
, vol.2
, pp. 349-359
-
-
Krishnamoorthy, P.K.1
Sircar, S.C.2
-
29
-
-
0003462862
-
Investigation of the oxidation behaviour of thin film and bulk copper
-
M. O'Reilly, X. Jiang, J.T. Beechinor, S. Lynch, C. NiDheasuna, J.C. Patterson, and G.M. Crean Investigation of the oxidation behaviour of thin film and bulk copper Applied Surface Science 91 1995 152 156
-
(1995)
Applied Surface Science
, vol.91
, pp. 152-156
-
-
O'Reilly, M.1
Jiang, X.2
Beechinor, J.T.3
Lynch, S.4
Nidheasuna, C.5
Patterson, J.C.6
Crean, G.M.7
-
30
-
-
0034276297
-
Kinetic investigation of copper film oxidation by spectroscopic ellipsometry and reflectometry
-
Y.Z. Hu, R. Sharangpani, and S.P. Tay Kinetic investigation of copper film oxidation by spectroscopic ellipsometry and reflectometry Journal of Vacuum Science and Technology A 18 2000 2527 2532
-
(2000)
Journal of Vacuum Science and Technology A
, vol.18
, pp. 2527-2532
-
-
Hu, Y.Z.1
Sharangpani, R.2
Tay, S.P.3
-
31
-
-
0035478037
-
Oxidation behaviour of Cu thin films on Si wafer at 175-400 C
-
W. Gao, H. Hong, J. He, A. Thomas, L. Chan, and S. Li Oxidation behaviour of Cu thin films on Si wafer at 175-400 C Materials Letters 51 2001 78 84
-
(2001)
Materials Letters
, vol.51
, pp. 78-84
-
-
Gao, W.1
Hong, H.2
He, J.3
Thomas, A.4
Chan, L.5
Li, S.6
-
32
-
-
33947448981
-
Low temperature oxidation of copper. I. Physical mechanism
-
T.N. Rhodin Jr. Low temperature oxidation of copper. I. Physical mechanism Journal of the American Chemical Society 72 1950 5102 5106
-
(1950)
Journal of the American Chemical Society
, vol.72
, pp. 5102-5106
-
-
Rhodin Jr., T.N.1
-
33
-
-
0026754889
-
Optical ellipsometry and electron spectroscopy studies of copper oxidation related to copper on printed circuit boards
-
A. Manara, V. Sirtori, and L. Mammarella Optical ellipsometry and electron spectroscopy studies of copper oxidation related to copper on printed circuit boards Surface and Interface Analysis 18 1992 32 38
-
(1992)
Surface and Interface Analysis
, vol.18
, pp. 32-38
-
-
Manara, A.1
Sirtori, V.2
Mammarella, L.3
-
34
-
-
0019525942
-
A critical appraisal of the logarithmic rate law in thin-film formation during oxidation of copper and its alloys
-
S.K. Roy, and S.C. Sircar A critical appraisal of the logarithmic rate law in thin-film formation during oxidation of copper and its alloys Oxidation of Metals 15 1981 9 20
-
(1981)
Oxidation of Metals
, vol.15
, pp. 9-20
-
-
Roy, S.K.1
Sircar, S.C.2
-
37
-
-
84877584380
-
-
Doctoral thesis, Tohoku University
-
J. Iijima, Doctoral thesis, Tohoku University, 2005.
-
(2005)
-
-
Iijima, J.1
-
38
-
-
33845979500
-
Formation of hollow ZnO through low-temperature oxidation of Zn nanoparticles
-
R. Nakamura, J.C. Lee, D. Tokozakura, H. Mori, and H. Nakajima Formation of hollow ZnO through low-temperature oxidation of Zn nanoparticles Materials Letters 61 2007 1060 1063
-
(2007)
Materials Letters
, vol.61
, pp. 1060-1063
-
-
Nakamura, R.1
Lee, J.C.2
Tokozakura, D.3
Mori, H.4
Nakajima, H.5
-
39
-
-
71049173351
-
Mechanistic investigation of ZnO nanowire growth
-
S. Rackauskas, A.G. Nasibulin, H. Jing, Y. Tian, G. Statkute, S. Shandakov, H. Lipsanen, and E.I. Kauppinnen Mechanistic investigation of ZnO nanowire growth Applied Physics Letters 95 2009 183114.1 183114.3
-
(2009)
Applied Physics Letters
, vol.95
, pp. 1831141-1831143
-
-
Rackauskas, S.1
Nasibulin, A.G.2
Jing, H.3
Tian, Y.4
Statkute, G.5
Shandakov, S.6
Lipsanen, H.7
Kauppinnen, E.I.8
-
42
-
-
0038180818
-
Film thickness studies for the chemically synthesized conducting polyaniline
-
M.M. Ayad, and M.A. Shenashin Film thickness studies for the chemically synthesized conducting polyaniline European Polymer Journal 39 2003 1319 1324
-
(2003)
European Polymer Journal
, vol.39
, pp. 1319-1324
-
-
Ayad, M.M.1
Shenashin, M.A.2
-
43
-
-
43949163694
-
Ellipsometric studies on the oxidation of thin copper films
-
M. Rauh, P. Wibmann, and M. Wolfel Ellipsometric studies on the oxidation of thin copper films Thin Solid Films 233 1993 289 292
-
(1993)
Thin Solid Films
, vol.233
, pp. 289-292
-
-
Rauh, M.1
Wibmann, P.2
Wolfel, M.3
-
46
-
-
77955708488
-
Depth profiling and angular dependent XPS analysis of ultra thin oxide film on duplex stainless steel
-
C. Donik, D. Mandrino, and M. Jenko Depth profiling and angular dependent XPS analysis of ultra thin oxide film on duplex stainless steel Vacuum 84 2010 1266 1269
-
(2010)
Vacuum
, vol.84
, pp. 1266-1269
-
-
Donik, C.1
Mandrino, D.2
Jenko, M.3
-
47
-
-
0008725887
-
Comparative investigation on copper oxides by depth profiling using XPS, RBS and GDOES
-
H. Bubert, E. Grallath, A. Quentmeier, M. Wielunski, and L. Borucki Comparative investigation on copper oxides by depth profiling using XPS, RBS and GDOES Fresenius Journal of Analytical Chemistry 353 1995 456 463
-
(1995)
Fresenius Journal of Analytical Chemistry
, vol.353
, pp. 456-463
-
-
Bubert, H.1
Grallath, E.2
Quentmeier, A.3
Wielunski, M.4
Borucki, L.5
-
49
-
-
9144226893
-
Oxidation kinetics of epitaxial (1 0 0) copper films at 25 C and 50 C
-
A.T. Fromhold Jr., and M.H. Anderson Jr. Oxidation kinetics of epitaxial (1 0 0) copper films at 25 C and 50 C Oxidation of Metals 62 2004 237 272
-
(2004)
Oxidation of Metals
, vol.62
, pp. 237-272
-
-
Fromhold Jr., A.T.1
Anderson Jr., M.H.2
-
50
-
-
0001286864
-
Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth
-
J. Lee, P.I. Rovira, I. An, and R.W. Collins Rotating-compensator multichannel ellipsometry: applications for real time Stokes vector spectroscopy of thin film growth Review of Scientific Instruments 69 1998 1800 1810
-
(1998)
Review of Scientific Instruments
, vol.69
, pp. 1800-1810
-
-
Lee, J.1
Rovira, P.I.2
An, I.3
Collins, R.W.4
-
52
-
-
5244337901
-
Über die Mitwirkung von phasengrenzreaktionen bei der oxydation von metallen und legierungen bei höheren temperaturen
-
K. Hauffe, and H. Pfeiffer Über die Mitwirkung von phasengrenzreaktionen bei der oxydation von metallen und legierungen bei höheren temperaturen Zeitschrift fur Elektrochemie 56 1956 390 398
-
(1956)
Zeitschrift fur Elektrochemie
, vol.56
, pp. 390-398
-
-
Hauffe, K.1
Pfeiffer, H.2
-
54
-
-
0005243342
-
Initial oxidation rate of nickel and effect of the curie temperature
-
H. Uhlig, J. Pickett, and J. MacNairn Initial oxidation rate of nickel and effect of the curie temperature Acta Metallurgica 7 1959 111 117
-
(1959)
Acta Metallurgica
, vol.7
, pp. 111-117
-
-
Uhlig, H.1
Pickett, J.2
Macnairn, J.3
-
55
-
-
0013545382
-
Structure and growth of thin films on metals exposed to oxygen
-
H.H. Uhlig Structure and growth of thin films on metals exposed to oxygen Corrosion Science 7 1967 325 339
-
(1967)
Corrosion Science
, vol.7
, pp. 325-339
-
-
Uhlig, H.H.1
-
56
-
-
0029230095
-
Space-charge modification of the ionic currents for oxide growth
-
A.T. Fromhold Space-charge modification of the ionic currents for oxide growth Solid State Ionics 75 1995 229 239
-
(1995)
Solid State Ionics
, vol.75
, pp. 229-239
-
-
Fromhold, A.T.1
-
58
-
-
0038412482
-
Initial oxidation kinetics of copper (1 1 0) film investigated by in situ UHV-TEM
-
G. Zhou, and J.C. Yang Initial oxidation kinetics of copper (1 1 0) film investigated by in situ UHV-TEM Surface Science 531 2003 359 367
-
(2003)
Surface Science
, vol.531
, pp. 359-367
-
-
Zhou, G.1
Yang, J.C.2
-
59
-
-
29044451121
-
Initial oxidation kinetics of Cu(1 0 0), (1 1 0) and (1 1 1) thin films investigated by in situ ultra-high-vacuum transmission electron microscopy
-
G. Zhou, and J.C. Yang Initial oxidation kinetics of Cu(1 0 0), (1 1 0) and (1 1 1) thin films investigated by in situ ultra-high-vacuum transmission electron microscopy Journal of Materials Research 20 2005 1684 1694
-
(2005)
Journal of Materials Research
, vol.20
, pp. 1684-1694
-
-
Zhou, G.1
Yang, J.C.2
-
60
-
-
0015064951
-
Oxidation of copper at high temperature
-
S. Mrowec, and A. Stoklosa Oxidation of copper at high temperature Oxidation of Metals 3 1971 291 311
-
(1971)
Oxidation of Metals
, vol.3
, pp. 291-311
-
-
Mrowec, S.1
Stoklosa, A.2
-
61
-
-
36549042056
-
Quantitative prediction of voids formation in a growing nickel oxide scale at 1373 K
-
K. Akiba, M. Ueda, K. Kawamura, and T. Maruyama Quantitative prediction of voids formation in a growing nickel oxide scale at 1373 K Materials Transactions 48 2007 2753 2761
-
(2007)
Materials Transactions
, vol.48
, pp. 2753-2761
-
-
Akiba, K.1
Ueda, M.2
Kawamura, K.3
Maruyama, T.4
-
62
-
-
36149014399
-
Surface mobility of copper ions on cuprous oxide
-
R. Frerichs, and I. Liberman Surface mobility of copper ions on cuprous oxide Physical Review 121 1961 991 996
-
(1961)
Physical Review
, vol.121
, pp. 991-996
-
-
Frerichs, R.1
Liberman, I.2
-
63
-
-
0036955773
-
Mechanical behaviour of nanocrystalline copper related to grain-boundary structure
-
Y. Champion, P. Langlois, S. Guerin, C. Langlois, and M.J. Hytch Mechanical behaviour of nanocrystalline copper related to grain-boundary structure Materials Research Society Symposium Proceedings 727 2002 R3.2.1 R3.2.12
-
(2002)
Materials Research Society Symposium Proceedings
, vol.727
-
-
Champion, Y.1
Langlois, P.2
Guerin, S.3
Langlois, C.4
Hytch, M.J.5
-
64
-
-
0141876566
-
Diffusion of radioactive copper during oxidation of copper foil
-
G.W. Castellan, and W.J. Moore Diffusion of radioactive copper during oxidation of copper foil Journal of Chemical Physics 17 1949 41 43
-
(1949)
Journal of Chemical Physics
, vol.17
, pp. 41-43
-
-
Castellan, G.W.1
Moore, W.J.2
-
65
-
-
0346119965
-
Temperature effects on the growth of oxide islands on Cu(1 1 0)
-
G. Zhou, and J.C. Yang Temperature effects on the growth of oxide islands on Cu(1 1 0) Applied Surface Science 222 2004 357 364
-
(2004)
Applied Surface Science
, vol.222
, pp. 357-364
-
-
Zhou, G.1
Yang, J.C.2
-
66
-
-
0041342221
-
Oxygen-diffusion-induced phase boundary migration in copper oxide thin films
-
J. Li, S.Q. Wang, J.W. Mayer, and K.N. Tu Oxygen-diffusion-induced phase boundary migration in copper oxide thin films Physical Review B 39 1989 12367 12370
-
(1989)
Physical Review B
, vol.39
, pp. 12367-12370
-
-
Li, J.1
Wang, S.Q.2
Mayer, J.W.3
Tu, K.N.4
-
67
-
-
0013002607
-
Parabolic rate constants and diffusion mechanisms in oxides and sulfides
-
W.J. Moore Parabolic rate constants and diffusion mechanisms in oxides and sulfides Zeitschrift fur Elektrochemie 63 1959 794 798
-
(1959)
Zeitschrift fur Elektrochemie
, vol.63
, pp. 794-798
-
-
Moore, W.J.1
-
68
-
-
0015346158
-
Short-circuit diffusion in the growth of nickel oxide scales on nickel crystal faces
-
R. Herchl, N.N. Khoi, T. Homma, and W.W. Smeltzer Short-circuit diffusion in the growth of nickel oxide scales on nickel crystal faces Oxidation of Metals 4 1972 35 49
-
(1972)
Oxidation of Metals
, vol.4
, pp. 35-49
-
-
Herchl, R.1
Khoi, N.N.2
Homma, T.3
Smeltzer, W.W.4
-
70
-
-
0017246019
-
Influence on the oxidation kinetics if metals by control of structure of oxide scale
-
S. Matsunaga, and T. Homma Influence on the oxidation kinetics if metals by control of structure of oxide scale Oxidation of Metals 10 1976 361 376
-
(1976)
Oxidation of Metals
, vol.10
, pp. 361-376
-
-
Matsunaga, S.1
Homma, T.2
-
71
-
-
36248966220
-
Oxidation kinetics of microcrystalline Ni-11.5Cr-4.5Co-0.5Al superalloy sheet fabricated by electron beam physical vapor deposition at 800 C
-
G. Zeng, M. Li, J. Han, X. He, and W. Li Oxidation kinetics of microcrystalline Ni-11.5Cr-4.5Co-0.5Al superalloy sheet fabricated by electron beam physical vapor deposition at 800 C Materials Letters 62 2008 289 292
-
(2008)
Materials Letters
, vol.62
, pp. 289-292
-
-
Zeng, G.1
Li, M.2
Han, J.3
He, X.4
Li, W.5
|