The oxidation kinetics of nickel thin films studied by spectroscopic ellipsometry

Thin Solid Films

Volumn 503, Issue 1-2, 2006, Pages 40-44

  Lopez Beltran A M ^a,b   Mendoza Galvan A ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

^b UNIVERSIDAD AUTÓNOMA DE SINALOA   (Mexico)

Author keywords

Ellipsometry; Nickel oxide; Oxidation

Indexed keywords

ELLIPSOMETRY; GLASS; MAGNETRON SPUTTERING; NICKEL COMPOUNDS; OXIDATION; RAPID THERMAL ANNEALING; X RAY DIFFRACTION ANALYSIS;

ANNEALING TEMPERATURE; ELLIPSOMETRIC SPECTRA; PARABOLIC KINETICS; SPECTROSCOPIC ELLIPSOMETRY;

METALLIC FILMS;

EID: 33644775604     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.11.031     Document Type: Article

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