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Volumn 62, Issue 3-4, 2004, Pages 237-272
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Oxidation kinetics of epitaxial (100) copper films at 25°C and 50°C
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Author keywords
Copper; Cu 2o; Oxidation kinetics; Oxides; Particle transport
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Indexed keywords
IONIC DIFFUSION;
OXIDATION KINETICS;
PARTICLE TRANSPORT;
COPPER;
COPPER OXIDES;
DATA ACQUISITION;
ELECTRIC CURRENTS;
ELECTRIC FIELDS;
HIGH TEMPERATURE EFFECTS;
OXIDATION;
REACTION KINETICS;
METALLIC FILMS;
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EID: 9144226893
PISSN: 0030770X
EISSN: None
Source Type: Journal
DOI: 10.1007/s11085-004-7810-z Document Type: Article |
Times cited : (15)
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References (28)
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