A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage

Precision Engineering

Volumn 37, Issue 3, 2013, Pages 771-781

  Li, Xinghui ^a   Gao, Wei ^a   Muto, Hiroshi ^a   Shimizu, Yuki ^a   Ito, So ^a   Dian, Songyi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Angle; Displacement; Measurement; Multi degree of freedom; Stage; Surface encoder

Indexed keywords

ANGLE; DISPLACEMENT; INTERFERENCE SIGNAL; MULTI-DEGREE-OF- FREEDOM; PRECISION POSITIONING; SIX-DEGREE-OF-FREEDOM; SURFACE ENCODERS; TRANSLATIONAL DISPLACEMENTS;

DIFFRACTION; END EFFECTORS; LIGHT SOURCES; MEASUREMENTS; PRECISION ENGINEERING; STAGES;

DIFFRACTION GRATINGS;

EID: 84876690482     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2013.03.005     Document Type: Article

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