Dynamics and control of the UNCC/MIT sub-atomic measuring machine

CIRP Annals - Manufacturing Technology

Volumn 50, Issue 1, 2001, Pages 373-376

  Hocken, R J ^a   Trumper, D L ^b   Wang, C ^a  

^a University of North Carolina at Charlotte   (United States)

^b Massachusetts Institute of Technology   (United States)

Author keywords

Control; Servomechanism; Ultra precision

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); ELECTRIC COMMUTATION; ELECTRIC HEATING; LINEAR MOTORS; MACHINE DESIGN; MAGNETIC SUSCEPTIBILITY; MECHANICAL VARIABLES MEASUREMENT; MOTION CONTROL; PLANERS; SERVOMECHANISMS; STATE SPACE METHODS; SUBSTRATES;

SUB-ATOMIC MEASURING MACHINES(SAMM);

ELECTRIC MACHINERY;

EID: 0034963732     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)62143-X     Document Type: Article

References (7)

1. Linear motor-levitated stage for photolithography
2. Design and analysis frame work for linear permanent-magnet machines
3. Atomic-scale precision motion stage (the angstrom stage)
4. Modeling and control of a six degree-of-freedom magnetic/fluidic motion control stage