Ultraprecision 6-axis table driven by means of walking drive

CIRP Annals - Manufacturing Technology

Volumn 49, Issue 1, 2000, Pages 299-302

  Shamoto, Eiji ^a   Murase, Hirokazu ^a   Moriwaki, Toshimichi ^a  

^a KOBE UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); DRIVES; MACHINE DESIGN; PIEZOELECTRIC DEVICES;

FEED TABLES;

MOUNTINGS;

EID: 0033715529     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)62950-3     Document Type: Article

References (6)

1. Yonezawa, H. et. al., 1990, Positioning Table with High Accuracy and High Speed, Annals of the CIRP, 39/1: 433-436.
2. Shamoto, E. and Moriwaki, T., 1997, Rigid XYθ table for Ultraprecision Machine Tool Driven by Means of Walking Drive, Annals of the CIRP, 46/1: 301-304.
3. Shamoto, E. and Moriwaki, T., 1992, Walking Drive - A New Precision Feed Drive, IMACS/SICE RM2S'92 Kobe: 231-236.
4. Burleigh Instrument Inc. Catalog.
5. Higuchi, T. et. al., 1988, Precise Positioner Utilizing Rapid Deformations of a Piezoelectric Element (in Japanese), J. JSPE, 54, 11: 2107-2112.
6. Shamoto, E., Shin, H. and Moriwaki, T., 1995, Ultraprecision Feed Drive System Based on Walking Drive, International Conference on Precision Engineering '95: 81-84.