Precision positioning control of a Sawyer motor-based two-axis planar motion stage

International Journal of Surface Science and Engineering

Volumn 3, Issue 3, 2009, Pages 253-271

  Dian, Songyi ^a,b   Arai, Yoshikazu ^a   Gao, Wei ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b SICHUAN UNIVERSITY   (China)

Author keywords

Motion control; Precision positioning; Sawyer motor; Sliding mode observer; SMO

Indexed keywords

MOTION CONTROL; SLIDING MODE CONTROL;

CLOSED-LOOP CONTROL; CONTROL STRATEGIES; PLANAR MOTION STAGE; POSITIONING PERFORMANCE; PRECISION POSITIONING; SAWYER MOTORS; SLIDING MODE OBSERVERS; TRACKING PERFORMANCE;

LINEAR MOTORS;

EID: 67649576986     PISSN: 1749785X     EISSN: 17497868     Source Type: Journal    
DOI: 10.1504/IJSURFSE.2009.026613     Document Type: Article

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