A three-axis autocollimator for detection of angular error motions of a precision stage

CIRP Annals - Manufacturing Technology

Volumn 60, Issue 1, 2011, Pages 515-518

  Gao, W ^a   Saito, Y ^a   Muto, H ^a   Arai, Y ^a   Shimizu, Y ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Metrology; Motion; Sensor

Indexed keywords

ANGULAR ERROR MOTIONS; AUTOCOLLIMATION; AUTOCOLLIMATORS; COLLIMATED LASER BEAMS; DIFFRACTED BEAMS; GRATING REFLECTORS; LASER DIODES; LINEAR STAGES; METROLOGY; MOTION; PRECISION STAGE; PROTOTYPE SENSOR; QUADRANT PHOTODIODES; THREE-AXIS;

FLIGHT DYNAMICS; SENSORS;

ERROR DETECTION;

EID: 79957633055     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2011.03.052     Document Type: Article

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