Precision machine tool X-Y stage utilizing a planar air bearing arrangement

CIRP Annals - Manufacturing Technology

Volumn 59, Issue 1, 2010, Pages 425-428

  Erkorkmaz, K ^a   Gorniak, J M ^a   Gordon, D J ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Conceptual design; Control; Metrology

Indexed keywords

AIR BEARING; DIRECT DRIVE; ERROR BUDGETS; MULTIVARIABLE CONTROL; PRECISION MACHINE TOOLS; STABILITY ANALYSIS; STIFFNESS ENHANCEMENT; THERMAL DEFORMATION; VIBRATION-DAMPING; XY STAGE;

BEARINGS (STRUCTURAL); CONCEPTUAL DESIGN; MACHINE TOOLS; PRECISION ENGINEERING;

COUPLINGS;

EID: 77955328835     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2010.03.086     Document Type: Article

References (8)

1. H. Shinno, H. Yoshioka, and K. Taniguichi A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining Annals of the CIRP 56 1 2007 369 372
2. A. Schubert, B. Schulz, and G. Blank A New Type of 3D Micro Machining System - Properties and Applications Proc. 10th CIRP Intl. Workshop on Modeling of Machining Operations Italy 2007
3. R.J. Hocken, D.L. Trumper, and C. Wang Dynamics and Control of the UNCC/MIT Sub-Atomic Measuring Machine Annals of the CIRP 50 1 2001 373 376
4. C. Brecher, P. Utsch, and C. Wenzel Five-Axes Accuracy Enhancement by Compact and Integral Design Annals of the CIRP 58 1 2009 355 358
5. Y. Altintas, and C.E. Okwudire Dynamic Stiffness Enhancement of Direct-Driven Machine Tools using Sliding Mode Control with Disturbance Recovery Annals of the CIRP 58 1 2009 335 338
6. D.C. Thompson, and P.A. McKeown The Design of an Ultra-Precision CNC Measuring Machine Annals of the CIRP 38 1 1989 501 504
7. S. Skogestad, and I. Postlethwaite Multivariable Feedback Control - Analysis and Design 2nd edition 2005 Wiley
8. M.-C. Weng, X. Lu, and D.L. Trumper Vibration Control of Flexible Beams using Sensor Averaging and Actuator Averaging Methods IEEE Trans. on Control Systems Technology 10 4 2002 568 577