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Journal of Applied Physics

Volumn 110, Issue 7, 2011, Pages

Plasma treatments to improve metal contacts in graphene field effect transistor

(3) Choi, Min Sup a Lee, Seung Hwan a Yoo, Won Jong a

a Sungkyunkwan University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AR PLASMAS; BONDING PROPERTY; DEPOSITED METAL; ELECTRICAL MEASUREMENT; GATE VOLTAGES; HYDROPHILIC PROPERTIES; METAL BONDING; METAL CONTACTS; O RADICALS; PLASMA TREATMENT;

ARGON; CHEMICAL REACTIONS; CHEMICAL VAPOR DEPOSITION; DRAIN CURRENT; ELECTRIC FIELD EFFECTS; GRAPHENE; ION BOMBARDMENT; METALS; PLASMA DEPOSITION; PLASMAS;

FIELD EFFECT TRANSISTORS;

EID: 80054992490 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3646506 Document Type: Article

Times cited : (66)

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