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Journal of Physics D: Applied Physics

Volumn 46, Issue 15, 2013, Pages

Time-resolved measurement of film growth during high-power pulsed magnetron sputtering (HIPIMS) of titanium

(5) Mitschker, F a Prenzel, M a Benedikt, J a Maszl, C a Von Keudell, A a

a RUHR UNIVERSITY BOCHUM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION PROFILES; DYNAMIC CHANGES; HIGH-POWER PULSED MAGNETRON SPUTTERING; TEMPORAL RESOLUTION; TEMPORAL VARIATION; TIME CONSTANTS; TIME RESOLVED MEASUREMENT; TIME-RESOLVED;

FILM GROWTH; MAGNETRON SPUTTERING; TITANIUM; TRANSPORT PROPERTIES;

GROWTH RATE;

EID: 84875840292 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/46/15/155204 Document Type: Article

Times cited : (12)

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