SCOPUS 정보 검색 플랫폼

Volumn 45, Issue 40, 2012, Pages

Time-resolved measurement of film growth during high-power pulsed magnetron sputtering (HPPMS) of titanium: The rotating shutter concept

(4) Mitschker, F a Prenzel, M a Benedikt, J a Von Keudell, A a

a RUHR UNIVERSITY BOCHUM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DECAY TIME; DEPOSITION PROFILES; FILM DEPOSITION; GROWTH FLUX; HIGH-POWER; PEAK POWER; PULSED MAGNETRON SPUTTERING; TEMPORAL RESOLUTION; TEMPORAL VARIATION; TIME RESOLVED MEASUREMENT;

FILM GROWTH; MAGNETRON SPUTTERING;

TITANIUM;

EID: 84866875604 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/45/40/402001 Document Type: Article

Times cited : (8)

References (7)

1
- 0000975178
- 10.1016/S0257-8972(99)00292-3 0257-8972
- Schneider J M, Helmersson U, Kouznetsov V, Maca K and Petrov I 1999 Surf. Coat. Technol. 122 290-3
- (1999) Surf. Coat. Technol. , vol.122 , Issue.2-3 , pp. 290-293
- Schneider, J.M.¹ Helmersson, U.² Kouznetsov, V.³ MacA, K.⁴ Petrov, I.⁵

2
- 84864265583
- 10.1116/1.3691832 0734-2101 A 030801
- Gudmundsson J T, Brenning N, Lundin D and Helmersson U 2012 J. Vac. Sci. Technol. A 30 030801
- (2012) J. Vac. Sci. Technol. , vol.30 , Issue.3
- Gudmundsson, J.T.¹ Brenning, N.² Lundin, D.³ Helmersson, U.⁴

3
- 0020204186
- 10.1016/0022-3115(82)90194-5 0022-3115
- Roth J, Varga P, Martinelli A, Scherzer B, Chen C K, Wampler W and Taglauer E 1982 J. Nucl. Mater. 111-112 123-9
- (1982) J. Nucl. Mater. , vol.111-112 , pp. 123-129
- Roth, J.¹ Varga, P.² Martinelli, A.³ Scherzer, B.⁴ Chen, C.K.⁵ Wampler, W.⁶ Taglauer, E.⁷

4
- 79952034604
- 10.1116/1.3517478 0734-2101 A 010801
- Donnelly V M, Guha J and Stafford L 2011 J. Vac. Sci. Technol. A 29 010801
- (2011) J. Vac. Sci. Technol. , vol.29 , Issue.1
- Donnelly, V.M.¹ Guha, J.² Stafford, L.³

5
- 77957724259
- 10.1063/1.3486018 0021-8979 063301
- Hecimovic A and Ehiasarian A P 2010 J. Appl. Phys. 108 063301
- (2010) J. Appl. Phys. , vol.108 , Issue.6
- Hecimovic, A.¹ Ehiasarian, A.P.²

6
- 79955962030
- 10.1109/TPS.2011.2106516 0093-3813
- Hecimovic A and Ehiasarian A P 2011 IEEE Trans. Plasma Sci. 39 1154-64
- (2011) IEEE Trans. Plasma Sci. , vol.39 , Issue.4 , pp. 1154-1164
- Hecimovic, A.¹ Ehiasarian, A.P.²

7
- 51849114555
- 0963-0252 035021
- Lundin D, Larsson P, Wallin E, Lattemann M, Brenning N and Helmersson U 2008 Plasma Sources Sci. Technol. 17 035021
- (2008) Plasma Sources Sci. Technol. , vol.17 , Issue.3
- Lundin, D.¹ Larsson, P.² Wallin, E.³ Lattemann, M.⁴ Brenning, N.⁵ Helmersson, U.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.